发明授权
- 专利标题: Helium management control system
- 专利标题(中): 氦管理控制系统
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申请号: US14523507申请日: 2014-10-24
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公开(公告)号: US09334859B2公开(公告)日: 2016-05-10
- 发明人: Paul E. Dresens , Gary S. Ash , Allen J. Bartlett , Bruce R. Andeen , Y. Roberto Than , Joseph Chopy, Jr.
- 申请人: Brooks Automation, Inc.
- 申请人地址: US MA Chelmsford
- 专利权人: Brooks Automation, Inc.
- 当前专利权人: Brooks Automation, Inc.
- 当前专利权人地址: US MA Chelmsford
- 代理机构: Hamilton, Brook, Smith & Reynolds, P.C.
- 主分类号: F04B37/08
- IPC分类号: F04B37/08 ; F17D1/04 ; F17D3/01 ; F17D3/18 ; F25J1/00 ; F24F11/00 ; B01D8/00 ; F25B9/00 ; F25B9/14 ; F25B45/00
摘要:
A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply. An appropriate supply of helium is distributed to each cryopump. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.
公开/授权文献
- US20150040596A1 Helium Management Control System 公开/授权日:2015-02-12
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