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1.发明授权Using chemical vapor deposited films to control domain orientation in block copolymer thin films 有权使用化学气相沉积膜控制嵌段共聚物薄膜中的畴取向公开(公告)号：US09040121B2
公开(公告)日：2015-05-26
申请号：US13761324
申请日：2013-02-07
发明人： C. Grant Willson , William Durand , Christopher John Ellison , Christopher Bates , Takehiro Seshimo , Julia Cushen , Logan Santos , Leon Dean , Erica Rausch
CPC分类号： C23C16/44 , B29C43/32 , B81C1/00031 , B81C2201/0149 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10S977/788 , Y10S977/809 , Y10S977/811 , Y10S977/839 , Y10S977/888 , Y10S977/89 , Y10S977/891 , Y10T428/24802 , Y10T428/31504
摘要： Vacuum deposited thin films of material are described to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nanostructured features in a block copolymer film that can serve as lithographic patterns.
摘要翻译： 描述了真空沉积的材料薄膜以产生与下面的嵌段共聚物膜的不同区域非优先相互作用的界面。 非优选界面防止形成润湿层并影响嵌段共聚物中结构域的取向。 沉积的聚合物的目的是在嵌段共聚物膜中产生可用作光刻图案的纳米结构特征。
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2.发明授权Anhydride copolymer top coats for orientation control of thin film block copolymers 有权用于薄膜嵌段共聚物取向控制的酐共聚物顶涂层公开(公告)号：US09314819B2
公开(公告)日：2016-04-19
申请号：US13922011
申请日：2013-06-19
发明人： Carlton Grant Willson , Christopher John Ellison , Takehiro Seshimo , Julia Cushen , Christopher M Bates , Leon Dean , Logan J Santos , Erica L Rausch , Michael Maher
IPC分类号： B05D7/26 , C09D137/00 , B05D7/00 , B05D1/00 , B05D5/00 , B81C1/00 , G03F7/00 , B82Y10/00 , B82Y40/00
CPC分类号： B05D7/56 , B05D1/005 , B05D5/00 , B05D7/52 , B05D2252/02 , B81C1/00031 , B81C2201/0149 , B82Y10/00 , B82Y40/00 , C09D137/00 , G03F7/0002
摘要： The use of self-assembled block copolymer structures to produce advanced lithographic patterns relies on control of the orientation of these structures in thin films. In particular, orientation of cylinders and lamellae perpendicular to the plane of the block copolymer film is required for most applications. The preferred method to achieve orientation is by heating. The present invention involves the use of polarity-switching top coats to control block copolymer thin film orientation by heating. The top coats can be spin coated onto block copolymer thin films from polar casting solvents and they change composition upon thermal annealing to become “neutral”. Top coats allow for the facile orientation control of block copolymers which would otherwise not be possible by heating alone.
摘要翻译： 使用自组装嵌段共聚物结构产生先进的光刻图案依赖于这些结构在薄膜中的取向的控制。 特别地，对于大多数应用，需要垂直于嵌段共聚物膜的平面的圆柱体和薄片的取向。 实现取向的优选方法是通过加热。 本发明涉及使用极性转换顶涂层通过加热控制嵌段共聚物薄膜取向。 顶涂层可以从极性浇铸溶剂中旋涂到嵌段共聚物薄膜上，并且它们在热退火时改变组成以变成“中性”。 顶涂层允许嵌段共聚物的容易取向控制，否则通过单独加热将不可能。
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3.发明申请Using Chemical Vapor Deposited Films to Control Domain Orientation in Block Copolymer Thin Films 审中-公开使用化学气相沉积膜控制嵌段共聚物薄膜中的畴取向公开(公告)号：US20150232689A1
公开(公告)日：2015-08-20
申请号：US14698253
申请日：2015-04-28
发明人： Carlton Grant Willson , William J. Durand , Christopher John Ellison , Christopher M. Bates , Takehiro Seshimo , Julia Cushen , Logan J. Santos , Leon Dean , Erica L. Rausch
IPC分类号： C09D153/00 , C03C17/30 , C03C17/34
CPC分类号： C09D153/00 , B29C43/32 , B81C1/00031 , B81C2201/0149 , B82Y10/00 , B82Y40/00 , C03C17/30 , C03C17/3405 , C03C2218/152 , C23C16/44 , G03F7/0002 , Y10S977/788 , Y10S977/809 , Y10S977/811 , Y10S977/839 , Y10S977/888 , Y10S977/89 , Y10S977/891 , Y10T428/24802 , Y10T428/31504 , Y10T428/31663 , Y10T428/31931
摘要： The present invention uses vacuum deposited thin films of material to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nanostructured features in a block copolymer film that can serve as lithographic patterns.
摘要翻译： 本发明使用真空沉积的材料薄膜来产生与下面的嵌段共聚物膜的不同区域非优先相互作用的界面。 非优选界面防止形成润湿层并影响嵌段共聚物中结构域的取向。 沉积的聚合物的目的是在嵌段共聚物膜中产生可用作光刻图案的纳米结构特征。
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4.发明授权Anhydride copolymer top coats for orientation control of thin film block copolymers 有权用于薄膜嵌段共聚物取向控制的酐共聚物顶涂层公开(公告)号：US09157008B2
公开(公告)日：2015-10-13
申请号：US13761918
申请日：2013-02-07
发明人： Carlton Grant Willson , Christopher John Ellison , Takehiro Seshimo , Julia Cushen , Christopher M. Bates , Leon Dean , Logan J. Santos , Erica L. Rausch
CPC分类号： G03F1/50 , B05D1/005 , B05D5/00 , B05D7/52 , B05D7/56 , B05D2252/02 , B81C1/00031 , B81C2201/0149 , B82Y10/00 , B82Y40/00 , C09D137/00 , C09D167/00 , G03F7/0002 , Y10T428/24802 , Y10T428/31663 , Y10T428/31855
摘要： Random copolymer top coats are described that can be spin coated onto block copolymer thin films and used to control the interfacial energy of the top coat-block copolymer interface. The top coats are soluble in aqueous weak base and can change surface energy once they are deposited onto the block copolymer thin film. The use of self-assembled block copolymers to produce advanced lithographic patterns relies on their orientation control in thin films.
摘要翻译： 描述了可以将旋涂在嵌段共聚物薄膜上的无规共聚物顶涂层，并用于控制顶部涂层 - 嵌段共聚物界面的界面能。 顶涂层可溶于弱碱水溶液，一旦沉积在嵌段共聚物薄膜上就可以改变表面能。 使用自组装嵌段共聚物来生产先进的平版印刷图案依赖于它们在薄膜中的取向控制。
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5.发明申请Anhydride Copolymer Top Coats for Orientation Control of Thin Film Block Copolymers 有权酸酐共聚物顶涂层用于薄膜嵌段共聚物的取向控制公开(公告)号：US20130344242A1
公开(公告)日：2013-12-26
申请号：US13922011
申请日：2013-06-19
发明人： Carlton Grant Willson , Christopher John Ellison , Takehiro Seshimo , Julia Cushen , Christopher M. Bates , Leon Dean , Logan J. Santos , Erica L. Rausch , Michael Maher
IPC分类号： C09D137/00
CPC分类号： B05D7/56 , B05D1/005 , B05D5/00 , B05D7/52 , B05D2252/02 , B81C1/00031 , B81C2201/0149 , B82Y10/00 , B82Y40/00 , C09D137/00 , G03F7/0002
摘要： The use of self-assembled block copolymer structures to produce advanced lithographic patterns relies on control of the orientation of these structures in thin films. In particular, orientation of cylinders and lamellae perpendicular to the plane of the block copolymer film is required for most applications. The preferred method to achieve orientation is by heating. The present invention involves the use of polarity-switching top coats to control block copolymer thin film orientation by heating. The top coats can be spin coated onto block copolymer thin films from polar casting solvents and they change composition upon thermal annealing to become “neutral”. Top coats allow for the facile orientation control of block copolymers which would otherwise not be possible by heating alone.
摘要翻译： 使用自组装嵌段共聚物结构产生先进的光刻图案依赖于这些结构在薄膜中的取向的控制。 特别地，对于大多数应用，需要垂直于嵌段共聚物膜的平面的圆柱体和薄片的取向。 实现取向的优选方法是通过加热。 本发明涉及使用极性转换顶涂层通过加热控制嵌段共聚物薄膜取向。 顶涂层可以从极性浇铸溶剂中旋涂到嵌段共聚物薄膜上，并且它们在热退火时改变组成以变成“中性”。 顶涂层允许嵌段共聚物的容易取向控制，否则通过单独加热将不可能。
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6.发明授权公开(公告)号：US10167410B2
公开(公告)日：2019-01-01
申请号：US14698253
申请日：2015-04-28
发明人： C. Grant Wilson , William J. Durand , Christopher John Ellison , Christopher M. Bates , Takehiro Seshimo , Julia Cushen , Logan J. Santos , Leon Dean , Erica L. Rausch
IPC分类号： C09D153/00 , C03C17/34 , C03C17/30
摘要： Vacuum deposited thin films of material are used to create an interface that non-preferentially interacts with different domains of an underlying block copolymer film. The non-preferential interface prevents formation of a wetting layer and influences the orientation of domains in the block copolymer. The purpose of the deposited polymer is to produce nano structured features in a block copolymer film that can serve as lithographic patterns.
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