Sort interface unit having probe capacitors
    5.
    发明申请
    Sort interface unit having probe capacitors 审中-公开
    对具有探针电容器的接口单元进行排序

    公开(公告)号:US20060038576A1

    公开(公告)日:2006-02-23

    申请号:US10922323

    申请日:2004-08-19

    申请人: Pooya Tadayon

    发明人: Pooya Tadayon

    IPC分类号: G01R31/02

    CPC分类号: G01R1/06766

    摘要: Briefly, in accordance with one embodiment of the invention, a sort interface unit of a wafer tester may include a micro-electromechanical system (MEMS) capacitor disposed between selected pairs of the probe tips of the sort interface unit, for example between power and ground probes. In one embodiment, the MEMS capacitor may be disposed at the ends of the probe tips nearer the wafer when the wafer is tested by the wafer tester. In another embodiment, a first capacitor having a higher value may be used for higher power circuits on the wafer, and a second capacitor having a lower value may be used for lower power circuits on the wafer. In such an arrangement, the capacitors on the probes of the sort interface unit may be selected according to a spatial power distribution of the power of the circuit or circuits on the wafer.

    摘要翻译: 简而言之,根据本发明的一个实施例,晶片测试器的分类接口单元可以包括设置在分类接口单元的选定对的探针尖端之间的微机电系统(MEMS)电容器,例如在电源和地之间 探针。 在一个实施例中,当通过晶片测试器测试晶片时,MEMS电容器可以设置在靠近晶片的探针尖端的端部。 在另一个实施例中,具有较高值的​​第一电容器可用于晶片上的较高功率电路,并且具有较低值的第二电容器可用于晶片上的较低功率电路。 在这种布置中,可以根据晶片上的电路或电路的功率的空间功率分布来选择分类接口单元的探针上的电容​​器。

    CHEVRON INTERCONNECT FOR VERY FINE PITCH PROBING

    公开(公告)号:US20190004089A1

    公开(公告)日:2019-01-03

    申请号:US15640415

    申请日:2017-06-30

    申请人: Pooya Tadayon

    发明人: Pooya Tadayon

    IPC分类号: G01R1/067 G01R1/073 G01R31/28

    摘要: An apparatus an apparatus comprising: a substrate having a plane; and an array of at least one conductive probe having a base affixed to the substrate, the at least one conductive probe having a major axis extending from the plane of the substrate and terminating at a tip, wherein the one or more conductive probes comprise at least three points that are non-collinear.