System and method for detecting substrate and manufacturing device

    公开(公告)号:US10467591B2

    公开(公告)日:2019-11-05

    申请号:US15521976

    申请日:2016-10-21

    Abstract: A system and a method for detecting a substrate and a manufacturing device are disclosed. The detection system includes: an emitting unit and a control unit; wherein the emitting unit provides a first reference light and a second reference light, the first reference light propagates to the control unit, the second reference light is modulated by the substrate to generate a test light, the test light propagates to the control unit; the control unit obtains and compares a power of the first reference light and a power of the test light so as to determine whether a foreign matter is present on a surface of the substrate. The detection system can prevent foreign matters such as photoresist from influencing other manufacturing devices such as cleaning and deposition devices, which is beneficial to the maintenance and service of the manufacturing devices.

    MEMS light valve and display device

    公开(公告)号:US10437044B2

    公开(公告)日:2019-10-08

    申请号:US15500900

    申请日:2016-04-25

    Abstract: Embodiments of the present disclosure provide a MEMS light valve, which includes: a fixed grating partitioned into first regions and second regions, which are arranged alternately, wherein the fixed grating comprises reflective units configured within the first regions for reflecting at least part of incident light and the second regions do not reflect light; and a movable grating located at a side of the fixed grating to which outside light is incident and movable in a plane where the movable grating is located, wherein the movable grating is capable of block part or all of the reflective units during moving. The embodiments of the present disclosure are adopted to manufacture of a MEMS light valve and a display device including the MEMS light valve.

    Display panel, manufacturing method thereof, and displaying device

    公开(公告)号:US12193263B2

    公开(公告)日:2025-01-07

    申请号:US18208212

    申请日:2023-06-09

    Abstract: Disclosed are a display panel, a manufacturing method thereof, and a displaying device. The display panel comprises a pixel layer, a support layer, a lens unit and a cover plate which are stacked in sequence. The support layer is located on a luminescent layer of the pixel layer. The lens unit comprises a lens layer, wherein the lens layer comprises a lens area and a non-lens area, and the lens area comprises multiple lenses arranged in an array. The display panel further comprises a polarization unit disposed on a light path between the pixel layer and the lens layer and configured to filter out light emitted from the pixel layer to the non-lens area.

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