公开(公告)号：US3573116A

公开(公告)日：1971-03-30

申请号：US3573116D

申请日：1968-01-03

Applicant: BELL TELEPHONE LABOR INC

Inventor： COHEN BARRY G ,  LILIENTUAL ROBERT

IPC: C30B31/08 ,  C30B31/10 ,  H01L21/00 ,  H01L7/34

CPC classification number: C30B31/10 ,  C30B29/06 ,  C30B31/08 ,  H01L21/00 ,  Y10S148/043 ,  Y10S148/049 ,  Y10S438/92

Abstract: A PROCESS FOR MASKED PLANAR DIFFUSION OF GALLIUM INTO THE UNMASKED PORTION OF A BULK SEMICONDUCTOR IS DESCRIBED IN WHICH THE DIFFUSION OCCURS IN A COMPLETELY WATER-FREE INERT AMBIENT SUCH AS NITROGEN GAS. A QUARTZ BOX DIFFUSION CAPSULE IS USED WITH A CONVENTIONAL DIFFUSION FURNACE IN WHICH THE NITROGEN CIRCULATES THROUGHOUT THE PROCESS.