公开(公告)号：US10522327B2

公开(公告)日：2019-12-31

申请号：US16044770

申请日：2018-07-25

Applicant: Applied Materials Israel Ltd.

Inventor： Gilad Erel ,  Michal Avinun-Kalish ,  Stefan Lanio

IPC: H01J37/02 ,  H01J37/28

Abstract: A charged particle beam specimen inspection system is described. The system includes an emitter for emitting at least one charged particle beam, a specimen support table configured for supporting the specimen, an objective lens for focusing the at least one charged particle beam, a charge control electrode provided between the objective lens and the specimen support table, wherein the charge control electrode has at least one aperture opening for the at least one charged particle beam, and a flood gun configured to emit further charged particles for charging of the specimen, wherein the charge control electrode has a flood gun aperture opening.

公开(公告)号：US20160035537A1

公开(公告)日：2016-02-04

申请号：US14446146

申请日：2014-07-29

Applicant: Applied Materials Israel, Ltd.

Inventor： Gilad Erel ,  Michal Avinun-Kalish ,  Stefan Lanio

IPC: H01J37/26 ,  H01J37/147 ,  H01J37/08

CPC classification number: H01J37/28 ,  H01J37/026 ,  H01J2237/0044 ,  H01J2237/0048

Abstract: A charged particle beam specimen inspection system is described. The system includes an emitter for emitting at least one charged particle beam, a specimen support table configured for supporting the specimen, an objective lens for focusing the at least one charged particle beam, a charge control electrode provided between the objective lens and the specimen support table, wherein the charge control electrode has at least one aperture opening for the at least one charged particle beam, and a flood gun configured to emit further charged particles for charging of the specimen, wherein the charge control electrode has a flood gun aperture opening.

Abstract translation: 描述带电粒子束样品检查系统。 该系统包括用于发射至少一个带电粒子束的发射器，被配置为支撑样本的样本支撑台，用于聚焦至少一个带电粒子束的物镜，设置在物镜和样本支架之间的充电控制电极 其中所述充电控制电极具有用于所述至少一个带电粒子束的至少一个开口开口，以及配置为发射用于对所述样本进行充电的另外的带电粒子的泛喷枪，其中所述充电控制电极具有喷枪孔开口。

公开(公告)号：US10056228B2

公开(公告)日：2018-08-21

申请号：US14446146

申请日：2014-07-29

Applicant: Applied Materials Israel, Ltd.

Inventor： Gilad Erel ,  Michal Avinun-Kalish ,  Stefan Lanio

IPC: H01J37/08 ,  H01J37/28 ,  H01J37/00 ,  H01J37/02

CPC classification number: H01J37/28 ,  H01J37/026 ,  H01J2237/0044 ,  H01J2237/0048

Abstract: A charged particle beam specimen inspection system is described. The system includes an emitter for emitting at least one charged particle beam, a specimen support table configured for supporting the specimen, an objective lens for focusing the at least one charged particle beam, a charge control electrode provided between the objective lens and the specimen support table, wherein the charge control electrode has at least one aperture opening for the at least one charged particle beam, and a flood gun configured to emit further charged particles for charging of the specimen, wherein the charge control electrode has a flood gun aperture opening.