公开(公告)号：US20140264296A1

公开(公告)日：2014-09-18

申请号：US14203419

申请日：2014-03-10

Applicant: APPLIED MATERIALS, INC.

Inventor： Young Jin CHOI ,  Beom Soo PARK ,  Soo Young CHOI

IPC: H01L51/52 ,  H01L51/00 ,  H01L51/56

CPC classification number: H01L51/5253 ,  H01L33/0075 ,  H01L33/44 ,  H01L33/52 ,  H01L33/56

Abstract: A method and apparatus for depositing an inorganic layer onto a substrate is described. The inorganic layer may be part of an encapsulating film utilized in various display applications. The encapsulating film includes one or more inorganic layers as barrier layers to improve water-barrier performance. An oxygen containing gas, such as nitrous oxide, is introduced during the deposition of the inorganic layer. As a result, the inorganic layer is lower in stress and may obtain a water vapor transmission rate (WVTR) of less than 100 mg/m2-day.

Abstract translation: 描述了一种将无机层沉积到基底上的方法和装置。 无机层可以是用于各种显示应用中的封装膜的一部分。 封装膜包括一个或多个作为阻挡层的无机层以改善防水性能。 在无机层的沉积期间引入含氧气体，例如一氧化二氮。 结果，无机层的应力较低，可得到小于100mg / m 2·日的水蒸气透过率（WVTR）。

公开(公告)号：US20140174361A1

公开(公告)日：2014-06-26

申请号：US14061831

申请日：2013-10-24

Applicant: Applied Materials, Inc.

Inventor： Jrjyan Jerry CHEN ,  Soo Young CHOI ,  Young Jin CHOI ,  Yi CUI ,  Beom Soo PARK ,  Robin L. TINER

IPC: C23C16/44

CPC classification number: C23C16/4401 ,  C23C16/45565 ,  C23C16/4557

Abstract: The present invention generally relates to a heated backing plate coupled to a gas distribution showerhead in a PECVD chamber. The backing plate is heated by circulating a heating fluid either through channels formed within the backing plate or a tube coupled to the backing plate. A heated backing plate heats up the gas distribution showerhead, which improves the cleaning rate of the PECVD chamber that performs low temperature processes.

Abstract translation: 本发明一般涉及一种联接到PECVD室中的气体分配喷头的加热背板。 通过循环加热流体来加热背板，通过形成在背板内的通道或耦合到背板的管。 加热的背板加热气体分配喷头，这提高了执行低温过程的PECVD室的清洁率。