公开(公告)号：US20210287955A1

公开(公告)日：2021-09-16

申请号：US17338239

申请日：2021-06-03

Applicant: Applied Materials, Inc.

Inventor： Rodney S. LIM ,  Jung Bae KIM ,  Jiarui WANG ,  Yi CUI ,  Dong Kil YIM ,  Soo Young CHOI

IPC: H01L23/31 ,  H01L27/12 ,  H01L21/02 ,  H01L29/786

Abstract: Embodiments of the present disclosure generally relate to nitrogen-rich silicon nitride and methods for depositing the same, and transistors and other devices containing the same. In one or more embodiments, methods for depositing silicon nitride materials are provided and include heating a workpiece to a temperature of about 200° C. to about 250° C., exposing the workpiece to a deposition gas during a plasma-enhanced chemical vapor deposition process, and depositing a nitrogen-rich silicon nitride layer on the workpiece. The deposition gas contains a silicon precursor, a nitrogen precursor, and a carrier gas. A molar ratio of the silicon precursor to the nitrogen precursor to the carrier gas within the deposition gas is about 1:a range from about 4 to about 8:a range from about 20 to about 80, respectively.

公开(公告)号：US20230274997A1

公开(公告)日：2023-08-31

申请号：US18195196

申请日：2023-05-09

Applicant: Applied Materials, Inc.

Inventor： Rodney S. LIM ,  Jung Bae KIM ,  Jiarui WANG ,  Yi CUI ,  Dong Kil YIM ,  Soo Young CHOI

IPC: H01L23/31 ,  H01L27/12 ,  H01L21/02 ,  H01L29/786

CPC classification number: H01L23/3192 ,  H01L27/1248 ,  H01L21/02211 ,  H01L21/0217 ,  H01L21/02274 ,  H01L29/786

Abstract: Embodiments of the present disclosure generally relate to nitrogen-rich silicon nitride and methods for depositing the same, and transistors and other devices containing the same. In one or more embodiments, a passivation film stack is provided and includes a silicon oxide layer disposed on a workpiece, a nitrogen-rich silicon nitride layer disposed on the silicon oxide layer, and a hydrogen-rich silicon nitride layer disposed on the nitrogen-rich silicon nitride layer. The hydrogen-rich silicon nitride layer has a greater hydrogen concentration than the nitrogen-rich silicon nitride layer.

公开(公告)号：US20210066153A1

公开(公告)日：2021-03-04

申请号：US16557102

申请日：2019-08-30

Applicant: Applied Materials, Inc.

Inventor： Rodney S. LIM ,  Jung Bae KIM ,  Jiarui WANG ,  Yi CUI ,  Dong Kil YIM ,  Soo Young CHOI

IPC: H01L23/31 ,  H01L27/12 ,  H01L29/786 ,  H01L21/02

Abstract: Embodiments of the present disclosure generally relate to nitrogen-rich silicon nitride and methods for depositing the same, and transistors and other devices containing the same. In one or more embodiments, a passivation film stack contains a silicon oxide layer disposed on a workpiece and a nitrogen-rich silicon nitride layer disposed on the silicon oxide layer. The nitrogen-rich silicon nitride layer has a silicon concentration of about 20 at % to about 35 at %, a nitrogen concentration of about 40 at % to about 75 at %, and a hydrogen concentration of about 10 at % to about 35 at %. In one or more examples, the passivation film stack contains the silicon oxide layer, the nitrogen-rich silicon nitride layer, and a third layer containing any type of silicon nitride, such as nitrogen-rich silicon nitride and/or hydrogen-rich silicon nitride.