公开(公告)号：US20250051965A1

公开(公告)日：2025-02-13

申请号：US18232668

申请日：2023-08-10

Applicant: Applied Materials, Inc.

Inventor： Gautam PISHARODY ,  Parth SWAROOP ,  Xiaoxiong YUAN ,  Paneendra Prakash BHAT ,  Qiwei LIANG ,  Dmitry LUBOMIRSKY ,  Adib KHAN ,  Douglas A. BUCHBERGER, Jr.

IPC: C30B35/00 ,  C30B25/02

Abstract: Disclosed herein are a showerhead and a deposition chamber containing the showerhead. The showerhead includes a first delivery network for a first precursor that comprises a first manifold connected with a first distribution system comprising a plurality of first distribution channels concentrically disposed around an axis, and a second delivery network for a second precursor that comprises a second manifold connected with a second distributions system comprising a plurality of second distribution channels concentrically disposed around the axis. The first delivery network and the second delivery network are isolated from each other within the showerhead.