公开(公告)号：US11552283B2

公开(公告)日：2023-01-10

申请号：US16985063

申请日：2020-08-04

Applicant: Applied Materials, Inc.

Inventor： Andreas Sauer ,  Thomas Deppisch ,  Mathew Dean Allison

IPC: H01M4/04 ,  C23C16/54 ,  C23C16/56 ,  B05D1/00 ,  B05D1/32 ,  C23C14/04 ,  C23C14/24 ,  C23C14/56 ,  C23C14/54

Abstract: A method of coating a flexible substrate in a roll-to-roll deposition system is described. The method includes unwinding the flexible substrate from an unwinding roll, the flexible substrate having a first coating on a first main side thereof; measuring a lateral positioning of the first coating while guiding the flexible substrate to a coating drum; adjusting a lateral position of the flexible substrate on the coating drum depending on the measured lateral positioning of the first coating; and depositing a second coating on the flexible substrate, particularly on a second main side of the flexible substrate opposite the first main side. Further described is a vacuum deposition apparatus for conducting the methods described herein.