公开(公告)号：US20190096624A1

公开(公告)日：2019-03-28

申请号：US16122003

申请日：2018-09-05

Applicant: Applied Materials, Inc.

Inventor： Gaku FURUTA ,  Soo Young CHOI ,  Yi CUI ,  Robin L. TINER ,  Jinhyun CHO ,  Jiarui WANG ,  Suhail ANWAR

IPC: H01J29/07 ,  C23C16/458 ,  C23C16/04 ,  H01J37/32

Abstract: Embodiments of the present disclosure generally relates a shadow frame including two opposing major side frame members adjacent to two opposing minor side frame members coupled together with a corner bracket, wherein the corner bracket includes a corner inlay having legs that extend in directions generally orthogonal to each other.