公开(公告)号：US20150027491A1

公开(公告)日：2015-01-29

申请号：US13951913

申请日：2013-07-26

Applicant: Applied Materials, Inc.

Inventor： Clinton SAKATA ,  Hui CHEN ,  Jim K. ATKINSON ,  Tomohiko KITAJIMA ,  Brian J. BROWN

IPC: H01L21/67

CPC classification number: H01L21/67046

Abstract: A buff module and method for using the same are provided. In one embodiment, a buff module includes housing having an interior volume, a plurality of drive rollers and a pair of buff heads. The drive rollers are arranged to rotate a substrate within the interior volume on a substantially horizontal axis. The buff heads are disposed in the housing, each buff head rotatable on an axis substantially aligned with the horizontal axis and movable to a position substantially parallel with the horizontal axis.

Abstract translation: 提供了一种buff模块及其使用方法。 在一个实施例中，抛光模块包括具有内部容积的壳体，多个驱动辊和一对抛光头。 驱动辊被布置成在基本上水平的轴线上旋转内部容积内的基板。 抛光头设置在壳体中，每个抛光头可在与水平轴线基本上对准的轴上旋转并且可移动到基本上与水平轴线平行的位置。

公开(公告)号：US20160228923A1

公开(公告)日：2016-08-11

申请号：US14616704

申请日：2015-02-07

Applicant: Applied Materials, Inc.

Inventor： David P. ALVAREZ ,  Jim K. ATKINSON

IPC: B08B1/00 ,  B29C43/02 ,  B08B13/00 ,  B08B1/04 ,  H01L21/67

CPC classification number: B08B1/002 ,  B08B1/04 ,  B08B11/02 ,  B08B13/00 ,  B29C43/021 ,  B29C2043/024 ,  B29C2043/025 ,  B29C2043/029 ,  B29K2027/12 ,  B29K2075/00 ,  B29L2031/7728 ,  H01L21/67046

Abstract: Compression molded articles employing circumferential surfaces having friction-enhancing patterns to contact substrates during wet chemical processes are disclosed. An article such as an annular body may be formed by a compression molding technique. By including a patterned surface as part of an outer circumferential surface of the annular body, frictional contact between the annular body and the substrate may be enhanced as friction-reducing fluids associated with a wet chemical processes may be directed away from the desired friction contact area between the annular body and the substrate. In this manner, frictional contact may be enhanced and the substrate may be effectively positioned and moved during the wet chemical process to improve the effectively of the process.

Abstract translation: 公开了在湿化学过程中使用具有摩擦增强图案的圆周表面以接触基底的压缩成型制品。 诸如环形体的物品可以通过压缩成型技术形成。 通过将图案化表面作为环形体的外圆周表面的一部分，可以增强环形体与基底之间的摩擦接触，因为与湿化学过程相关联的减摩流体可以被指向远离期望的摩擦接触面积 在环形体和衬底之间。 以这种方式，可以增强摩擦接触，并且可以在湿化学过程期间有效地定位和移动基底，以有效地改进该方法。