公开(公告)号：US20240032183A1

公开(公告)日：2024-01-25

申请号：US18373128

申请日：2023-09-26

Applicant: Applied Materials, Inc.

Inventor： Costel BILOIU ,  David T. BLAHNIK ,  Wai-Ming TAM ,  Charles T. CARLSON ,  Frank SINCLAIR

IPC: H05H7/02 ,  H05H7/12 ,  H05H9/00

CPC classification number: H05H7/02 ,  H05H7/12 ,  H05H9/00 ,  H05H2007/025

Abstract: An exciter for a high frequency resonator. The exciter may include an exciter coil inner portion, extending along an exciter axis, an exciter coil loop, disposed at a distal end of the exciter coil inner portion. The exciter may also include a drive mechanism, including at least a rotation component to rotate the exciter coil loop around the exciter axis.

公开(公告)号：US20240395500A1

公开(公告)日：2024-11-28

申请号：US18758499

申请日：2024-06-28

Applicant: Applied Materials, Inc.

Inventor： Frank SINCLAIR

IPC: H01J37/317

Abstract: A method of stress management in a substrate, using angled ion implantation to introduced anisotropic stress within the substrate.

公开(公告)号：US20240179828A1

公开(公告)日：2024-05-30

申请号：US18431579

申请日：2024-02-02

Applicant: Applied Materials, Inc.

Inventor： David T. BLAHNIK ,  Charles T. CARLSON ,  Robert B. VOPAT ,  Frank SINCLAIR ,  Paul J. MURPHY ,  Krag R. SENIOR

IPC: H05H7/22

CPC classification number: H05H7/22 ,  H05H2007/222

Abstract: Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.