公开(公告)号：US20140273762A1

公开(公告)日：2014-09-18

申请号：US13839899

申请日：2013-03-15

Applicant: Applied Materials, Inc.

Inventor： Rajkumar Alagarsamy ,  Yongqi Hu ,  Simon Yavelberg ,  Periya Gopalan ,  Christopher R. Mahon

IPC: B24B37/20

CPC classification number: B24B37/205 ,  B24B37/22

Abstract: A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

Abstract translation: 抛光制品具有抛光表面和孔，该孔包括第一部分和第二部分。 抛光制品包括向内延伸到孔中的突起。 抛光制品包括在离研磨表面更远的第一表面的一侧的下部。 窗口具有位于孔的第一部分中的第一部分和延伸到孔的第二部分中的第二部分。 窗口具有基本上平行于抛光表面的第二表面。 第一粘合剂将突起的第一表面粘附到窗口的第二表面以将窗口固定到突起，并且将第二粘合剂与不同于第一粘合剂的材料组合物粘合。 第二粘合剂横向定位在窗的第二部分和抛光制品的下部之间。

公开(公告)号：US20230278158A1

公开(公告)日：2023-09-07

申请号：US18295250

申请日：2023-04-03

Applicant: Applied Materials, Inc.

Inventor： Rajkumar Alagarsamy ,  Yongqi Hu ,  Simon Yavelberg ,  Periya Gopalan ,  Christopher R. Mahon

IPC: B24B37/20 ,  B24B37/22 ,  B24B49/12

CPC classification number: B24B37/205 ,  B24B37/22 ,  B24B37/20 ,  B24B49/12

Abstract: A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

公开(公告)号：US11618124B2

公开(公告)日：2023-04-04

申请号：US16987206

申请日：2020-08-06

Applicant: Applied Materials, Inc.

Inventor： Rajkumar Alagarsamy ,  Yongqi Hu ,  Simon Yavelberg ,  Periya Gopalan ,  Christopher R. Mahon

IPC: B24B37/22 ,  B24B37/20 ,  B24B49/12

Abstract: A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

公开(公告)号：US20180065227A1

公开(公告)日：2018-03-08

申请号：US15676882

申请日：2017-08-14

Applicant: Applied Materials, Inc.

Inventor： Rajkumar Alagarsamy ,  Yongqi Hu ,  Simon Yavelberg ,  Periya Gopalan ,  Christopher R. Mahon

IPC: B24B37/20

Abstract: A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

公开(公告)号：US08961266B2

公开(公告)日：2015-02-24

申请号：US13839899

申请日：2013-03-15

Applicant: Applied Materials, Inc.

Inventor： Rajkumar Alagarsamy ,  Yongqi Hu ,  Simon Yavelberg ,  Periya Gopalan ,  Christopher R. Mahon

IPC: B24B49/12 ,  B24B37/20

CPC classification number: B24B37/205 ,  B24B37/22

Abstract: A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

Abstract translation: 抛光制品具有抛光表面和孔，该孔包括第一部分和第二部分。 抛光制品包括向内延伸到孔中的突起。 抛光制品包括在离研磨表面更远的第一表面的一侧的下部。 窗口具有位于孔的第一部分中的第一部分和延伸到孔的第二部分中的第二部分。 窗口具有基本上平行于抛光表面的第二表面。 第一粘合剂将突起的第一表面粘附到窗口的第二表面以将窗口固定到突起，并且将第二粘合剂与不同于第一粘合剂的材料组合物粘合。 第二粘合剂横向定位在窗的第二部分和抛光制品的下部之间。

公开(公告)号：US09731397B2

公开(公告)日：2017-08-15

申请号：US14594661

申请日：2015-01-12

Applicant: Applied Materials, Inc.

Inventor： Rajkumar Alagarsamy ,  Yongqi Hu ,  Simon Yavelberg ,  Periya Gopalan ,  Christopher R. Mahon

IPC: B24B37/20 ,  B24B49/12

CPC classification number: B24B37/205 ,  B24B37/22

Abstract: A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

公开(公告)号：US10744618B2

公开(公告)日：2020-08-18

申请号：US15676882

申请日：2017-08-14

Applicant: Applied Materials, Inc.

Inventor： Rajkumar Alagarsamy ,  Yongqi Hu ,  Simon Yavelberg ,  Periya Gopalan ,  Christopher R. Mahon

IPC: B24B37/22 ,  B24B37/20 ,  B24B49/12

Abstract: A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

公开(公告)号：US20160136780A1

公开(公告)日：2016-05-19

申请号：US15006622

申请日：2016-01-26

Applicant: Applied Materials, Inc.

Inventor： Stacy Meyer ,  Young J. Paik ,  Christopher R. Mahon

IPC: B24B37/32

CPC classification number: B24B37/32 ,  Y10T29/49826

Abstract: A carrier head includes a base, a substrate mounting surface, a retaining ring secured to the base, and a plurality of stacked shims located between the base and the retaining ring. The retaining ring has a bottom surface for contacting a polishing pad during polishing.

Abstract translation: 承载头包括基座，基板安装表面，固定到基座的保持环以及位于基座和保持环之间的多个堆叠的垫片。 保持环具有用于在抛光期间接触抛光垫的底表面。

公开(公告)号：US20150126100A1

公开(公告)日：2015-05-07

申请号：US14594661

申请日：2015-01-12

Applicant: Applied Materials, Inc.

Inventor： Rajkumar Alagarsamy ,  Yongqi Hu ,  Simon Yavelberg ,  Periya Gopalan ,  Christopher R. Mahon

IPC: B24B37/20

CPC classification number: B24B37/205 ,  B24B37/22

Abstract: A polishing article has a polishing surface and an aperture, the aperture including a first section and a second section. The polishing article includes a projection extending inwardly into the aperture. The polishing article includes a lower portion on a side of the first surface farther from the polishing surface. A window has a first portion positioned in the first section of the aperture and a second portion extending into the second section of the aperture. The window has a second surface substantially parallel to the polishing surface. A first adhesive adheres the first surface of the projection to the second surface of the window to secure the window to the projection and a second adhesive of different material composition than the first adhesive. The second adhesive is positioned laterally between the second portion of the window and the lower portion of the polishing article.

Abstract translation: 抛光制品具有抛光表面和孔，该孔包括第一部分和第二部分。 抛光制品包括向内延伸到孔中的突起。 抛光制品包括在离研磨表面更远的第一表面的一侧的下部。 窗口具有位于孔的第一部分中的第一部分和延伸到孔的第二部分中的第二部分。 窗口具有基本上平行于抛光表面的第二表面。 第一粘合剂将突起的第一表面粘附到窗口的第二表面以将窗口固定到突起，并且将第二粘合剂与不同于第一粘合剂的材料组合物粘合。 第二粘合剂横向定位在窗的第二部分和抛光制品的下部之间。