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    Optical Inspection System and Method Including Accounting for Variations of Optical Path Length Within a Sample
    2.
    发明公开
    Optical Inspection System and Method Including Accounting for Variations of Optical Path Length Within a Sample 审中-公开

    公开(公告)号：US20230314321A1

    公开(公告)日：2023-10-05

    申请号：US18205551

    申请日：2023-06-04

    Applicant: Apple Inc.

    Inventor： Mark Alan Arbore ,  Matthew A. Terrel

    IPC: G01N21/59 ,  G01N21/49

    CPC classification number: G01N21/59 ,  G01N21/49 ,  G01N2021/1782

    Abstract: An illuminator/collector assembly can deliver incident light to a sample and collect return light returning from the sample. A sensor can measure ray intensities as a function of ray position and ray angle for the collected return light. A ray selector can select a first subset of rays from the collected return light at the sensor that meet a first selection criterion. In some examples, the ray selector can aggregate ray intensities into bins, each bin corresponding to rays in the collected return light that traverse within the sample an estimated optical path length within a respective range of optical path lengths. A characterizer can determine a physical property of the sample, such as absorptivity, based on the ray intensities, ray positions, and ray angles for the first subset of rays. Accounting for variations in optical path length traversed within the sample can improve accuracy.

    Optical System for Reference Switching
    4.
    发明申请
    Optical System for Reference Switching 有权

    公开(公告)号：US20220136899A1

    公开(公告)日：2022-05-05

    申请号：US17576117

    申请日：2022-01-14

    Applicant: Apple Inc.

    Inventor： Mark Alan Arbore ,  Gary Shambat ,  Matthew A. Terrel

    IPC: G01J3/02 ,  G01J3/10 ,  G01J3/36 ,  G01J3/42 ,  G01N21/25 ,  G01N21/49

    Abstract: Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, et al. on effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non-simultaneous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.

    Optical System for Reference Switching
    5.
    发明申请
    Optical System for Reference Switching 有权

    公开(公告)号：US20210010860A1

    公开(公告)日：2021-01-14

    申请号：US17030328

    申请日：2020-09-23

    Applicant: Apple Inc.

    Inventor： Mark Alan Arbore ,  Gary Shambat ,  Matthew A. Terrel

    IPC: G01J3/02 ,  G01J3/10 ,  G01J3/36 ,  G01J3/42 ,  G01N21/25 ,  G01N21/49

    Abstract: Systems and methods for determining one or more properties of a sample are disclosed. The systems and methods disclosed can be capable of measuring along multiple locations and can reimage and resolve multiple optical paths within the sample. The system can be configured with one-layer or two-layers of optics suitable for a compact system. The optics can be simplified to reduce the number and complexity of the coated optical surfaces, et al. on effects, manufacturing tolerance stack-up problems, and interference-based spectroscopic errors. The size, number, and placement of the optics can enable multiple simultaneous or non-simultaneous measurements at various locations across and within the sample. Moreover, the systems can be configured with an optical spacer window located between the sample and the optics, and methods to account for changes in optical paths due to inclusion of the optical spacer window are disclosed.

    Optical system for noise mitigation
    6.
    发明授权
    Optical system for noise mitigation 有权

    公开(公告)号：US12140291B2

    公开(公告)日：2024-11-12

    申请号：US18543225

    申请日：2023-12-18

    Applicant: Apple Inc.

    Inventor： Mark Alan Arbore ,  Matthew A. Terrel

    IPC: G02B27/48 ,  F21V3/00 ,  F21V5/00 ,  F21V5/04 ,  F21V14/00 ,  G01N21/01 ,  G02B5/02 ,  G02B19/00 ,  G02B27/30

    Abstract: Configurations for a photonics assembly design and methods for mitigating coherent noise thereof are disclosed. The photonics assembly may include a set of light sources, an optical subsystem that may include a set of optical elements, and a diffusing element. The light emitted by the set of light sources may be different wavelengths and the light may be de-cohered by a phase shifter before being received by the set of optical elements. The diffusing element may be moveable and may be capable of repeating the same positions or set of positions for each beam of light emitted by the set of light sources. By combining the coherent noise mitigation techniques of the moveable diffusing element and the de-cohered light, the photonics system may provide an illumination profile with a specific spatial profile and angular profile on the sample that allows reliable measurement of the sample and coherent noise mitigation.

    Mach-Zehnder interferometer device for wavelength locking
    7.
    发明授权
    Mach-Zehnder interferometer device for wavelength locking 有权

    公开(公告)号：US11835836B1

    公开(公告)日：2023-12-05

    申请号：US17015974

    申请日：2020-09-09

    Applicant: Apple Inc.

    Inventor： Yi-Kuei Wu ,  Jason Pelc ,  Mark Alan Arbore ,  Thomas C. Greening ,  Matthew A. Terrel ,  Yongming Tu ,  Mohamed Mahmoud

    IPC: G02F1/21

    CPC classification number: G02F1/21 ,  G02F1/212

    Abstract: Disclosed herein is an integrated photonics device including an on-chip wavelength stability monitor. The wavelength stability monitor may include one or more interferometric components, such as Mach-Zehnder interferometers and can be configured to select among the output signals from the interferometric components for monitoring the wavelength emitted by a corresponding photonic component, such as a light source. The selection may be based on a slope of the output signal and in some examples may correspond to a working zone at or around a wavelength or wavelength range. In some examples, the interferometric components can be configured with different phase differences such that the corresponding working zones have different wavelengths. In some examples, the slopes of the output signals may be weighted based on the steepness of the slope and all of the output signals may include information for wavelength locking the measured wavelength to the target wavelength.

    Despeckling in Optical Measurement Systems
    10.
    发明公开
    Despeckling in Optical Measurement Systems 审中-公开

    公开(公告)号：US20240102856A1

    公开(公告)日：2024-03-28

    申请号：US18234794

    申请日：2023-08-16

    Applicant: Apple Inc.

    Inventor： Matthew A. Terrel ,  David S. Gere ,  Alexander F. Sugarbaker ,  Thomas C. Greening ,  Jason S. Pelc ,  Mark A. Arbore

    IPC: G01J1/44 ,  G02B6/43

    CPC classification number: G01J1/44 ,  G02B6/43 ,  G01J2001/444

    Abstract: Embodiments are directed to optical measurement systems that utilize multiple emitters to emit light during a measurement, as well as methods of performing measurements using these optical measurement systems. The optical measurement systems may include a light generation assembly that is configured to generate light via a light source unit, and a photonic integrated circuit that includes a launch group having a plurality of emitters. Each of these emitters is optically coupled to the light generation assembly to receive light generated from the light generation assembly, and may emit this light from a surface of the photonic integrated circuit. The optical measurement system may perform a measurement in which the light generation assembly generates light and each of the plurality of emitters simultaneously emit light received from the light generation assembly.

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