公开(公告)号：US20200106236A1

公开(公告)日：2020-04-02

申请号：US16356324

申请日：2019-03-18

Applicant: Adnanotek Corp.

Inventor： KAI YANG

IPC: H01S3/0951 ,  H01S3/22 ,  H01S3/034 ,  H01S3/036 ,  H01S3/041

Abstract: A laser-heated cavity system includes: a first cavity provided with a first top end part and a first bottom end part that are arranged opposite each other; wherein the first top end part is provided with a first widow and the first bottom end part is provided with an opening; a second cavity disposed inside the first cavity, provided with a second top end part and a second bottom end part that are arranged opposite each other, and disposed with a second window and a sample bearer; a laser heating assembly disposed outside the first cavity; wherein at least one laser beam provided by the laser heating assembly is passed through the first and second windows, and then focused on the sample bearer; and a mobile platform assembly. The first cavity is a vacuum cavity, and the pressure in the second cavity ranges from vacuum to 30 atm.

公开(公告)号：US20180135181A1

公开(公告)日：2018-05-17

申请号：US15353680

申请日：2016-11-16

Applicant: ADNANOTEK CORP.

Inventor： KAI YANG

IPC: C23C16/48 ,  H01S5/183 ,  H01S5/024 ,  G01J5/10 ,  H01S5/42 ,  C23C16/52

CPC classification number: C23C16/483 ,  C23C14/5813 ,  G01J5/0818 ,  G01J5/10 ,  G01J2005/103 ,  H01S5/02252 ,  H01S5/0228 ,  H01S5/423

Abstract: The instant disclosure provides a large-area laser heating system including a laser module, a reaction module and a guiding module. The laser module includes a vertical-cavity surface-emitting laser for emitting a laser beam and a laser adjusting structure connected to the vertical-cavity surface-emitting laser. The incident angle of the laser beam emitted by the vertical-cavity surface-emitting laser is adjusted by the laser adjusting structure. The reaction module includes a sample holder for carrying a sample. The guiding module is connected between the laser module and the reaction module, and the laser beam emitted by the vertical-cavity surface-emitting laser passes through the guiding module and projects onto the surface of the sample.

公开(公告)号：US20180142355A1

公开(公告)日：2018-05-24

申请号：US15356444

申请日：2016-11-18

Applicant: ADNANOTEK CORP.

Inventor： KAI YANG ,  SHANG-YUNG PAI

IPC: C23C16/50 ,  H01J37/32 ,  C23C16/455 ,  H01L21/02 ,  H01L21/3065

CPC classification number: C23C16/50 ,  C23C16/45544 ,  C23C16/505 ,  C23C16/56 ,  H01J37/32082 ,  H01J2237/334

Abstract: The instant disclosure provides a system integrating atomic layer deposition (ALD) and reaction ion etching (RIE) including a reaction device and a sample moving device. The reaction device includes a first reaction chamber and a second reaction chamber communicated to the first reaction chamber. The sample moving device is disposed in the reaction device, wherein a sample is controlled by the sample moving device and moves into the first reaction chamber for conducting atomic layer deposition or moves into the second reaction chamber for conducting reactive ion etching.