公开(公告)号：US20220020559A1

公开(公告)日：2022-01-20

申请号：US17379815

申请日：2021-07-19

Applicant: ATTOLIGHT AG

Inventor： Christian Monachon ,  Matthew John Davies ,  Fabrice Grondin

IPC: H01J37/22 ,  H01J37/04 ,  H01J37/28

Abstract: Method for investigating samples by time-series emission of cathodoluminescence (CL) microscope having electron beam and light sensor. In discovery scan, changes caused by the electron beam are unknown, in an inspection scan changes have already been identified in similar sample. Discovery scan starts by setting parameters of the electron beam to irradiate at a first rate of dose; flushing the buffer of the light sensor; scanning the electron beam over an area of interest on the sample while collecting CL emission with the light sensor, while preventing any reading of the data from the buffer until the entire scanning has been completed; once the entire scanning has been completed, blanking the electron beam and interrogating the buffer to identify a first CL image; and then interrogating the buffer to fetch all remaining CL images and tagging all fetched CL images according to time sequence starting from the first CL image.

公开(公告)号：US11798778B2

公开(公告)日：2023-10-24

申请号：US17379815

申请日：2021-07-19

Applicant: ATTOLIGHT AG

Inventor： Christian Monachon ,  Matthew John Davies ,  Fabrice Grondin

IPC: H01J37/22 ,  H01J37/28 ,  H01J37/04

CPC classification number: H01J37/222 ,  H01J37/045 ,  H01J37/28 ,  H01J2237/2808

Abstract: Method for investigating samples by time-series emission of cathodoluminescence (CL) microscope having electron beam and light sensor. In discovery scan, changes caused by the electron beam are unknown, in an inspection scan changes have already been identified in similar sample. Discovery scan starts by setting parameters of the electron beam to irradiate at a first rate of dose; flushing the buffer of the light sensor; scanning the electron beam over an area of interest on the sample while collecting CL emission with the light sensor, while preventing any reading of the data from the buffer until the entire scanning has been completed; once the entire scanning has been completed, blanking the electron beam and interrogating the buffer to identify a first CL image; and then interrogating the buffer to fetch all remaining CL images and tagging all fetched CL images according to time sequence starting from the first CL image.