公开(公告)号：US3626184A

公开(公告)日：1971-12-07

申请号：US3626184D

申请日：1970-03-05

Applicant: ATOMIC ENERGY COMMISSION

Inventor： CREWE ALBERT V

IPC: H01J37/04 ,  H01J37/05 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J49/48

CPC classification number: H01J37/28 ,  H01J37/045 ,  H01J37/05 ,  H01J37/22 ,  H01J37/244 ,  H01J49/484 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24507 ,  H01J2237/24585

Abstract: In an electron microscope transmitted electrons are detected according to whether they are unscattered, elastically scattered or inelastically scattered by the specimen. The elastically scattered electrons are further separated according to the magnitude of the scattering. Signals from the separate detectors can be used separately or combined as desired to enhance the information obtained from a specimen.