公开(公告)号：US20230229090A1

公开(公告)日：2023-07-20

申请号：US18010637

申请日：2021-06-02

申请人： ASML Netherlands B.V.

发明人： Victor Sebastiaan Dolk ,  Koos Van Berkel ,  Mauritius Gerardus Elisabeth Schneiders

IPC分类号： G03F7/00

CPC分类号： G03F7/70266 ,  G03F7/706 ,  G03F7/70504 ,  G03F7/70625 ,  G03F7/70633 ,  G03F7/70641 ,  G03F7/70891 ,  G02B7/028

摘要： The invention provides a method for thermo-mechanical control of a heat sensitive element (Ml) subject to a heat load, comprising: -providing a non-linear thermo-mechanical model of the heat sensitive element describing a dynamical relationship between characteristics of the heat load and deformation of the heat sensitive element; -calculating a control signal on the basis of an optimization calculation of the non-linear model, -providing an actuation signal to a heater (HE), wherein the actuation signal is at least partially based on the control signal, -heating the heat sensitive element by the heater on the basis of the actuation signal.