公开(公告)号：US10345711B2

公开(公告)日：2019-07-09

申请号：US15682135

申请日：2017-08-21

申请人： ASML NETHERLANDS B.V.

发明人： Christiaan Alexander Hoogendam ,  Gerrit Johannes Nijmeijer ,  Minne Cuperus ,  Petrus Anton Willem Cornelia Maria Van Eijck

IPC分类号： G03F7/20 ,  G03F9/00 ,  G01B11/26 ,  G01B11/14 ,  G01B11/27

摘要： A method for determining an offset between a center of a substrate and a center of a depression in a chuck includes providing a test substrate to the depression, the test substrate having a dimension smaller than a dimension of the depression, measuring a position of an alignment mark of the test substrate while in the depression, and determining the offset between the center of the substrate and the center of the depression from the position of the alignment mark.

公开(公告)号：US09182222B2

公开(公告)日：2015-11-10

申请号：US13672539

申请日：2012-11-08

申请人： ASML NETHERLANDS B.V.

发明人： Christiaan Alexander Hoogendam ,  Gerrit Johannes Nijmeijer ,  Minne Cuperus ,  Petrus Anton Willem Cornelia Maria Van Eijck

IPC分类号： G03B27/52 ,  G03B27/42 ,  G03B27/58 ,  G01B11/26 ,  G03F7/20 ,  G03F9/00

CPC分类号： G03F7/70341 ,  G01B11/14 ,  G01B11/26 ,  G01B11/272 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70775 ,  G03F9/7011

摘要： A method for determining an offset between a center of a substrate and a center of a depression in a chuck includes providing a test substrate to the depression, the test substrate having a dimension smaller than a dimension of the depression, measuring a position of an alignment mark of the test substrate while in the depression, and determining the offset between the center of the substrate and the center of the depression from the position of the alignment mark.

摘要翻译： 用于确定衬底的中心和卡盘中的凹陷的中心之间的偏移的方法包括向所述凹陷提供测试衬底，所述测试衬底具有小于所述凹陷的尺寸的尺寸，测量对准的位置 在凹陷期间测试基板的标记，并且从对准标记的位置确定基板的中心与凹陷的中心之间的偏移。

公开(公告)号：US20180067401A1

公开(公告)日：2018-03-08

申请号：US15682135

申请日：2017-08-21

申请人： ASML NETHERLANDS B.V.

发明人： Christiaan Alexander HOOGENDAM ,  Gerrit Johannes Nijmeijer ,  Minne Cuperus ,  Petrus Anton Willem Cornelia Maria Van Eijck

IPC分类号： G03F7/20 ,  G03F9/00 ,  G01B11/14 ,  G01B11/27 ,  G01B11/26

CPC分类号： G03F7/70341 ,  G01B11/14 ,  G01B11/26 ,  G01B11/272 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70775 ,  G03F9/7011

摘要： A method for determining an offset between a center of a substrate and a center of a depression in a chuck includes providing a test substrate to the depression, the test substrate having a dimension smaller than a dimension of the depression, measuring a position of an alignment mark of the test substrate while in the depression, and determining the offset between the center of the substrate and the center of the depression from the position of the alignment mark.

公开(公告)号：US09740106B2

公开(公告)日：2017-08-22

申请号：US14931560

申请日：2015-11-03

申请人： ASML Netherlands B.V.

发明人： Christiaan Alexander Hoogendam ,  Gerrit Johannes Nijmeijer ,  Minne Cuperus ,  Petrus Anton Willem Cornelia Maria Van Eijck

IPC分类号： G03B27/52 ,  G03B27/58 ,  G03F7/20 ,  G03F9/00 ,  G01B11/26 ,  G01B11/14 ,  G01B11/27

CPC分类号： G03F7/70341 ,  G01B11/14 ,  G01B11/26 ,  G01B11/272 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70775 ,  G03F9/7011

摘要： A method for determining an offset between a center of a substrate and a center of a depression in a chuck includes providing a test substrate to the depression, the test substrate having a dimension smaller than a dimension of the depression, measuring a position of an alignment mark of the test substrate while in the depression, and determining the offset between the center of the substrate and the center of the depression from the position of the alignment mark.