公开(公告)号：US20240168394A1

公开(公告)日：2024-05-23

申请号：US18398860

申请日：2023-12-28

Applicant: ASML NETHERLANDS B.V.

Inventor： Stef Marten Johan JANSSENS ,  Bert Dirk SCHOLTEN ,  Sjoerd Nicolaas Lambertus DONDERS ,  Teunis VAN DAM ,  Peter Mark OVERSCHIE ,  Theresa Mary SPAAN-BURKE ,  Siegfried Alexander TROMP

IPC: G03F7/00 ,  H01L21/683

CPC classification number: G03F7/70725 ,  G03F7/707 ,  G03F7/70783 ,  G03F7/70816 ,  H01L21/6838 ,  H01L21/67288

Abstract: A system for positioning, a stage system, a lithographic apparatus, a method for positioning and a method for manufacturing a device in which use is made of a stage system that includes a plurality of gas bearing devices. Each gas bearing device includes: a gas bearing body, which has a free surface, a primary channel which extends through the gas bearing body and has an inlet opening in the free surface, a secondary channel system which extends through the gas bearing body and which has a plurality of discharge openings in the free surface. The flow resistance in the secondary channel system is higher than the flow resistance in the primary channel.

公开(公告)号：US20190187571A1

公开(公告)日：2019-06-20

申请号：US16309501

申请日：2017-06-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Stef Marten Johan JANSSENS ,  Bert Dirk SCHOLTEN ,  Sjoerd Nicolaas Lambertus DONDERS ,  Teunis VAN DAM ,  Peter Mark OVERSCHIE ,  Theresa Mary SPAAN-BURKE ,  Siegfried Alexander TROMP

IPC: G03F7/20

CPC classification number: G03F7/70725 ,  G03F7/70625 ,  G03F7/707 ,  H01L21/67288 ,  H01L21/6838

Abstract: A system for positioning, a stage system, a lithographic apparatus, a method for positioning and a method for manufacturing a device in which use is made of a stage system. The stage system has a plurality of air bearing devices. Each air bearing device has: a gas bearing body which has a free surface, a primary channel which extends through the bearing body and has an inlet opening in the free surface, and a secondary channel system which extends through the bearing body and which has a plurality of discharge openings in the free surface. The flow resistance in the secondary channel system can be higher than the flow resistance in the primary channel.