公开(公告)号：US09293951B2

公开(公告)日：2016-03-22

申请号：US13737848

申请日：2013-01-09

Applicant: ASML NETHERLANDS B.V.

Inventor： Fidelus Adrianus Boon ,  Hendrikus Pascal Gerardus Johannes Van Agtmaal ,  Abdelhamid Kechroud ,  Sven Antoin Johan Hol ,  Peter Michel Silvester Maria Heijmans

IPC: G03B27/58 ,  H02K1/06 ,  G03F7/20

CPC classification number: H02K1/06 ,  G03F7/70758

Abstract: A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each attached opposite to each other to the first part of the apparatus, the first magnet assembly including a first main magnet system and a first outer subsidiary magnet system, and the second magnet assembly including a second main magnet system and a second outer subsidiary magnet system, the first and second main magnet system defining a space between them in a second direction perpendicular to the first direction. The actuator includes a coil attached to the second part. The distance between the first outer subsidiary magnet system and the second outer subsidiary magnet system in the second direction is substantially zero.

Abstract translation: 光刻设备包括用于在包括第一磁体组件和第二磁体组件的第一和第二部分之间沿第一方向产生力的致动器，每个第一磁体组件和第二磁体组件彼此相对地安装到装置的第一部分，第一磁体组件包括 第一主磁体系统和第一外部辅助磁体系统，第二磁体组件包括第二主磁体系统和第二外部辅助磁体系统，第一和第二主磁体系统在垂直于第二主磁体系统的第二方向上在它们之间限定空间 第一个方向。 致动器包括附接到第二部件的线圈。 第一外辅助磁体系统和第二外辅助磁体系统在第二方向上的距离基本为零。