公开(公告)号：US20200041895A1

公开(公告)日：2020-02-06

申请号：US16339402

申请日：2017-09-18

Applicant: ASML NETHERLANDS B.V.

Inventor： Stef Marten Johan JANSSENS ,  Koen CUYPERS ,  Rogier Hendrikus Magdalena CORTIE ,  Sudhir SRIVASTAVA ,  Theodorus Johannes Antonius RENCKENS ,  Jeroen Gerard GOSEN ,  Erik Henricus Egidius Catharina EUMMELEN ,  Hendrikus Johannes SCHELLENS ,  Adrianus Marinus Wouter HEEREN ,  Bo LENSSEN

IPC: G03F7/00 ,  F16K31/00 ,  F16K37/00 ,  H01L21/67

Abstract: A pressure control valve has: a passageway having a flow opening; an member displaceable relative to the opening for obstructing the opening by differing amounts; a piezo actuator; and a linkage mechanism adapted to amplify a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the member relative to the opening, wherein the linkage mechanism comprises a frame attached to a wall and fixed at a first end in relation to the passageway, a portion of the frame moveable in a first direction while being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending between the wall and the movable portion such that an expansion of the piezo actuator results in movement of the movable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the member.

公开(公告)号：US20220075264A1

公开(公告)日：2022-03-10

申请号：US17524816

申请日：2021-11-12

Applicant: ASML NETHERLANDS B.V.

Inventor： Stef Marten Johan JANSSENS ,  Koen CUYPERS ,  Rogier Hendrikus Magdalena CORTIE ,  Sudhir SRIVASTAVA ,  Theodorus Johannes Antonius RENCKENS ,  Jeroen Gerard GOSEN ,  Erik Henricus Egidius Catharina EUMMELEN ,  Hendrikus Johannes SCHELLENS ,  Adrianus Marinus Wouter HEEREN ,  Bo LENSSEN

IPC: G03F7/00 ,  F16K31/00 ,  F16K37/00 ,  H01L21/67

Abstract: A pressure control valve has: a passageway having a flow opening; an member displaceable relative to the opening for obstructing the opening by differing amounts; a piezo actuator; and a linkage mechanism adapted to amplify a dimensional change in the piezo actuator and to use the amplified dimensional change to displace the member relative to the opening, wherein the linkage mechanism comprises a frame attached to a wall and fixed at a first end in relation to the passageway, a portion of the frame moveable in a first direction while being substantially restrained in a second direction orthogonal to the first direction, the piezo actuator extending between the wall and the movable portion such that an expansion of the piezo actuator results in movement of the movable portion in the first direction by an amount greater than the expansion of the piezo actuator, the moveable portion connected to the member.

公开(公告)号：US20170277042A1

公开(公告)日：2017-09-28

申请号：US15505885

申请日：2015-07-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Johannes Antonius Gerardus AKKERMANS ,  Ruud Antonius Catharina Maria BEERENS ,  Sander Christiaan BROERS ,  Jeroen Johannes Theodorus Hendrikus DE BEST ,  Adrianus Marinus Wouter HEEREN ,  George Alois Leonie LEENKNEGT ,  Bo LENSSEN ,  Hendrikus Johannes SCHELLENS ,  Peter VAN DER KRIEKEN ,  Theodorus Petrus Maria CADEE ,  Jan VAN EIJK ,  Richard Henricus Adrianus VAN LIESHOUT

IPC: G03F7/20 ,  G01L1/16

CPC classification number: G03F7/70775 ,  G01L1/16 ,  G01P15/0915 ,  G01P15/18 ,  G03F7/70716 ,  G03F7/70783 ,  G03F7/7085

Abstract: A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.