公开(公告)号：US20230332669A1

公开(公告)日：2023-10-19

申请号：US18025636

申请日：2021-09-28

Applicant: ASML NETHERLANDS B.V.

Inventor： Erheng WANG ,  Adrianus Marinus VERDONCK ,  Adjan Gerrard Pieter Ivo SCHEERHOORN ,  Xu WANG ,  Jianzi SUI ,  Chin-Fa TU ,  Martijn Petrus Christianus VAN HEUMEN

IPC: F16F15/04

CPC classification number: F16F15/04 ,  F16F2230/0005 ,  F16F2230/0023 ,  F16F2230/007 ,  F16F2230/22

Abstract: A vacuum system configured to mitigate damage or risk associated with a pump malfunction (e.g., an imbalance, a catastrophic failure, etc.). An exemplary vacuum pump includes a housing; a vibration isolator coupled to the vacuum pump housing and configured to isolate vibrations generated by the vacuum pump during operation; and a stop structure disposed between the vacuum pump housing and an adjacent fixture. The stop structure configured to prevent displacement of the vacuum pump housing relative to the fixture above a threshold amount, wherein the displacement of the vacuum pump housing is configured to be within the threshold amount during normal operation. The vacuum system may further include a collar configured to limit an axial displacement of the pump.