Invention Publication
- Patent Title: VACUUM SYSTEM FOR MITIGATING DAMAGE DUE TO A VACUUM PUMP MALFUNCTION
-
Application No.: US18025636Application Date: 2021-09-28
-
Publication No.: US20230332669A1Publication Date: 2023-10-19
- Inventor: Erheng WANG , Adrianus Marinus VERDONCK , Adjan Gerrard Pieter Ivo SCHEERHOORN , Xu WANG , Jianzi SUI , Chin-Fa TU , Martijn Petrus Christianus VAN HEUMEN
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- International Application: PCT/EP2021/076550 2021.09.28
- Date entered country: 2023-03-09
- Main IPC: F16F15/04
- IPC: F16F15/04

Abstract:
A vacuum system configured to mitigate damage or risk associated with a pump malfunction (e.g., an imbalance, a catastrophic failure, etc.). An exemplary vacuum pump includes a housing; a vibration isolator coupled to the vacuum pump housing and configured to isolate vibrations generated by the vacuum pump during operation; and a stop structure disposed between the vacuum pump housing and an adjacent fixture. The stop structure configured to prevent displacement of the vacuum pump housing relative to the fixture above a threshold amount, wherein the displacement of the vacuum pump housing is configured to be within the threshold amount during normal operation. The vacuum system may further include a collar configured to limit an axial displacement of the pump.
Information query