公开(公告)号：US20190179162A1

公开(公告)日：2019-06-13

申请号：US16217424

申请日：2018-12-12

Applicant: ASML Holding N.V.

Inventor： Douglas C. CAPPELLI ,  Stanislav SMIRNOV ,  Richard Carl ZIMMERMAN ,  Joshua ADAMS ,  Alexander Kenneth RAUB ,  Yevgeniy Konstantinovich SHMAREV

IPC: G02B27/28 ,  G01N21/47 ,  G03F7/20

Abstract: According to one embodiment, a prism system is provided. The prism system includes a polarizing beam splitter (PBS) surface. The PBS surface is configured to generate first and second sub-beams having corresponding first and second polarization information from a received beam, the second polarization information being different than the first polarization information. A first optical path of the first sub-beam within the prism system has substantially same length as a second optical path of the second sub-beam within the prism system. Additionally or alternatively, the first sub-beam achieves a predetermined polarization extinction ratio.

公开(公告)号：US20230359127A1

公开(公告)日：2023-11-09

申请号：US18026115

申请日：2021-08-24

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Hans BUTLER ,  Arie Jeffrey DEN BOEF ,  Mark Constant Johannes BAGGEN ,  Jeroen Arnoldus Leonardus Johannes RAAYMAKERS ,  Richard Carl ZIMMERMAN

IPC: G03F7/00

CPC classification number: G03F7/70625 ,  G03F7/706835

Abstract: A metrology tool that includes a substrate table to hold a substrate; a projection system configured to project a beam on a target portion of the substrate; an actuator configured to adjust a position of the projection system relative to the substrate on the substrate table; a sensor configured to determine a position of the substrate table; and a one or more processors configured to: determine, based on the position of the substrate table, a position error of the substrate table with respect to a reference; and control, via the actuator, a position of the projection system to compensate for the position error of the substrate table so that the beam projects on the target portion of the substrate.

公开(公告)号：US20200326556A1

公开(公告)日：2020-10-15

申请号：US16913698

申请日：2020-06-26

Applicant: ASML Holding N.V.

Inventor： Douglas C. CAPPELLI ,  Stanislav SMIRNOV ,  Richard Carl ZIMMERMAN ,  Joshua ADAMS ,  Alexander Kenneth RAUB ,  Yevgeniy Konstantinovich SHMAREV

IPC: G02B27/28 ,  G01N21/47 ,  G03F7/20 ,  G01N21/956

Abstract: According to one embodiment, a prism system is provided. The prism system includes a polarizing beam splitter (PBS) surface. The PBS surface is configured to generate first and second sub-beams having corresponding first and second polarization information from a received beam, the second polarization information being different than the first polarization information. A first optical path of the first sub-beam within the prism system has substantially same length as a second optical path of the second sub-beam within the prism system. Additionally or alternatively, the first sub-beam achieves a predetermined polarization extinction ratio.