公开(公告)号：US10481507B2

公开(公告)日：2019-11-19

申请号：US16328750

申请日：2017-08-18

Applicant: ASML HOLDING N.V. ,  ASML NETHERLANDS B.V.

Inventor： Kevin J. Violette ,  Igor Matheus Petronella Aarts ,  Haico Victor Kok ,  Eric Brian Catey

IPC: G03F7/20 ,  G03F9/00

Abstract: A method, including printing an apparatus mark onto a structure while the structure is at least partly within a lithographic apparatus. The structure may be part of, or is located on, a substrate table, but is separate from a substrate to be held by the apparatus. The method further includes measuring the apparatus mark using a sensor system within the apparatus.

公开(公告)号：US10670978B2

公开(公告)日：2020-06-02

申请号：US15505874

申请日：2015-08-11

Applicant: ASML HOLDING N.V.

Inventor： King Pui Leung ,  Tao Chen ,  Kevin J. Violette

IPC: G03F9/00 ,  G01B11/27 ,  G02B6/02 ,  G03F7/20

Abstract: A spectrally broadened radiation apparatus, including a laser configured to emit, through an output of the laser, radiation substantially only in the visible region of the electromagnetic spectrum, the radiation having a nominal wavelength, and an optical fiber optically coupled to the output of the laser, the optical fiber having an input to receive the radiation from the laser and having an output to provide spectrally broadened output radiation, the optical fiber configured to spectrally broaden the radiation from the laser to a spectral width of at least 0.5 nm around the nominal wavelength.

公开(公告)号：US10082740B2

公开(公告)日：2018-09-25

申请号：US15540595

申请日：2015-11-26

Applicant: ASML Holding N.V.

Inventor： Tao Chen ,  King Pui Leung ,  Kevin J. Violette

IPC: G03B27/42 ,  G03B27/54 ,  G03F9/00 ,  G03F7/20

CPC classification number: G03F9/7065 ,  G03F7/70141 ,  G03F7/70575

Abstract: An alignment system having long term stability in illumination center wavelength is discussed. The alignment system includes a tunable radiation source and a feedback control system. The tunable radiation source includes a light source configured to provide a broadband radiation beam and a tunable multi-passband filter configured to filter the broadband radiation beam into narrow band radiation beam having a center wavelength value. The feedback control system is configured to measure the center wavelength value of the narrow band radiation beam and compare the measured center wavelength value with a desired center wavelength value. The feedback control system is further configured to generate a control signal based on the comparison in response to a difference being present between the measured center wavelength value and the desired center wavelength value and tune the tunable filter based on the control signal to eliminate or substantially reduce the difference.