公开(公告)号：US11276545B1

公开(公告)日：2022-03-15

申请号：US17131666

申请日：2020-12-22

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Yosef Basson ,  Yuri Belenky ,  Mordechai Rozen ,  Lior Klein ,  Asaf Grosz

IPC: H01J37/09 ,  H01J37/244 ,  H01J37/28

Abstract: A method, a non-transitory computer readable medium and a system for compensating for an electromagnetic interference induced deviation of an electron beam. The method may include obtaining measurement information about a magnetic field within an electron beam tool, the measurement information is generated by at least one planar Hall Effect magnetic sensor that is located within the electron beam tool; wherein the at least one planar Hall Effect magnetic sensor comprises at least one magnetometer integrated with at least one magnetic flux concentrator; estimating the electromagnetic interference induced deviation of the electron beam, the estimating is based on the magnetic field; and setting a trajectory of the electron beam to compensate for the electromagnetic interference induced deviation of the electron beam.