公开(公告)号：US20190259586A1

公开(公告)日：2019-08-22

申请号：US16403970

申请日：2019-05-06

Applicant: APPLIED MATERIALS, INC.

Inventor： WILLIAM JOHANSON ,  FUHONG ZHANG ,  YU Y. LIU ,  ADOLPH MILLER ALLEN

IPC: H01J37/34 ,  C23C14/54 ,  C23C14/50 ,  C23C14/34 ,  H01J37/32

Abstract: Embodiments of improved apparatus for maintaining low non-uniformity over the life of a target are provided herein. In some embodiments, an apparatus includes a substrate support within a volume of a chamber body, opposite a target assembly of a lid atop the chamber body, with a surface; a shield disposed within the chamber body comprising one or more sidewalls surrounding the volume, the shield extending downward to below a top surface of the substrate support, radially inward, and returning upward forming an extending lip; and a first ring having (i) a first portion comprising an opening having a ceramic isolator, disposed therein, resting on top of the extending lip, and (ii) a second portion extending away from the first portion toward the surface, wherein the substrate support, over a life of the target, is configured to raise and lower, relative to the first ring, a substrate disposed on the surface.

公开(公告)号：US20160035547A1

公开(公告)日：2016-02-04

申请号：US14725527

申请日：2015-05-29

Applicant: APPLIED MATERIALS, INC.

Inventor： WILLIAM JOHANSON ,  BRIJ DATTA ,  FUHONG ZHANG ,  ADOLPH MILLER ALLEN ,  YU Y. LIU ,  PRASHANTH KOTHNUR

IPC: H01J37/34 ,  C23C14/35

CPC classification number: H01J37/3405 ,  C23C14/35 ,  H01J37/3452 ,  H01J37/3455 ,  H01J37/3461

Abstract: Methods and apparatus for a magnetron assembly are provided herein. In some embodiments, a magnetron assembly includes a shunt plate having a central axis and rotatable about the central axis, a closed loop magnetic pole coupled to a first surface of the shunt plate and disposed 360 degrees along a peripheral edge of the shunt plate, and an open loop magnetic pole coupled at a the first surface of the shunt plate wherein the open loop magnetic pole comprises two rows of magnets disposed about the central axis.

Abstract translation: 本文提供了磁控管组件的方法和装置。 在一些实施例中，磁控管组件包括具有中心轴线并可围绕中心轴线旋转的分流板，耦合到分流板的第一表面并沿分流板的周边边缘设置360度的闭环磁极，以及 耦合在分流板的第一表面处的开环磁极，其中开环磁极包括围绕中心轴设置的两排磁体。