公开(公告)号：US09644267B2

公开(公告)日：2017-05-09

申请号：US13937815

申请日：2013-07-09

申请人： Applied Materials, Inc.

发明人： Brian H. Burrows ,  Alexander Tam ,  Ronald Stevens ,  Kenric T. Choi ,  James David Felsch ,  Jacob Grayson ,  Sumedh Acharya ,  Sandeep Nijhawan ,  Lori D. Washington ,  Nyi O. Myo

IPC分类号： C23C16/455 ,  C30B25/14 ,  C30B29/40

CPC分类号： C23C16/45565 ,  C23C16/45514 ,  C23C16/45519 ,  C23C16/45574 ,  C23C16/45578 ,  C30B25/14 ,  C30B29/403 ,  Y10T137/0318 ,  Y10T137/87153

摘要： A method and apparatus that may be utilized for chemical vapor deposition and/or hydride vapor phase epitaxial (HVPE) deposition are provided. In one embodiment, a metal organic chemical vapor deposition (MOCVD) process is used to deposit a Group III-nitride film on a plurality of substrates. A Group III precursor, such as trimethyl gallium, trimethyl aluminum or trimethyl indium and a nitrogen-containing precursor, such as ammonia, are delivered to a plurality of straight channels which isolate the precursor gases. The precursor gases are injected into mixing channels where the gases are mixed before entering a processing volume containing the substrates. Heat exchanging channels are provided for temperature control of the mixing channels to prevent undesirable condensation and reaction of the precursors.

公开(公告)号：US08679956B2

公开(公告)日：2014-03-25

申请号：US13751889

申请日：2013-01-28

申请人： Applied Materials, Inc.

发明人： Alexander Tam ,  Anzhong Chang ,  Sumedh Acharya

IPC分类号： H01L21/36 ,  C23C16/00

CPC分类号： B05B1/18 ,  C23C16/45519 ,  C23C16/45565 ,  C23C16/52 ,  C30B25/14 ,  H01L21/67115

摘要： A method and apparatus that includes a processing chamber that includes a showerhead with separate inlets and channels for delivering separate processing gases into a processing volume of the chamber without mixing the gases prior to entering the processing volume is provided. The showerhead includes one or more cleaning gas conduits configured to deliver a cleaning gas directly into the processing volume of the chamber while by-passing the processing gas channels. The showerhead may include a plurality of metrology ports configured to deliver a cleaning gas directly into the processing volume of the chamber while by-passing the processing gas channels. As a result, the processing chamber components can be cleaned more efficiently and effectively than by introducing cleaning gas into the chamber only through the processing gas channels.

摘要翻译： 提供了一种包括处理室的方法和装置，该处理室包括具有单独的入口和通道的喷头，用于将不同的处理气体输送到室的处理容积中，而不会在进入处理容积之前混合气体。 淋浴头包括一个或多个清洁气体管道，其配置成在旁路处理气体通道的同时将清洁气体直接输送到室的处理容积中。 淋浴头可以包括多个计量端口，其配置成在旁路处理气体通道的同时将清洁气体直接输送到室的处理容积中。 结果，与仅通过处理气体通道将清洁气体引入室中相比，可以更有效和有效地清洁处理室部件。

公开(公告)号：US20220362995A1

公开(公告)日：2022-11-17

申请号：US17869721

申请日：2022-07-20

申请人： Applied Materials, Inc.

发明人： Dakshalkumar Patel ,  Girish Kumar Chaturvedi ,  Bahubali S. Upadhye ,  Sumedh Acharya ,  Mahendran Chidambaram ,  Nilesh Chimanrao Bagul

IPC分类号： B29C64/205 ,  B29C64/264 ,  B29C64/245 ,  B29C64/255 ,  B29C64/241

摘要： An additive manufacturing apparatus includes an environmentally sealed first chamber, a second chamber separated from the first chamber by a first valve, a platform positionable in the first chamber, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform in the first chamber, at least one energy source to selectively fuse feed material in a layer on the platform in the first chamber, and an air knife assembly to direct a laminar flow of air across a layer of feed material on the platform in the first chamber. The air knife assembly includes an inlet module and an exhaust module that are movable through the first valve between the first chamber and the second chamber.

公开(公告)号：US11413817B2

公开(公告)日：2022-08-16

申请号：US16684524

申请日：2019-11-14

申请人： Applied Materials, Inc.

发明人： Dakshalkumar Patel ,  Girish Kumar Chaturvedi ,  Bahubali S. Upadhye ,  Sumedh Acharya ,  Mahendran Chidambaram ,  Nilesh Chimanrao Bagul

IPC分类号： B29C64/20 ,  B29C64/35 ,  B29C64/371 ,  B29C64/245 ,  B29C64/205 ,  B33Y30/00 ,  B33Y10/00 ,  B33Y40/00

摘要： An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife assembly. The air knife assembly includes an inlet unit to deliver gas over the platform and an exhaust unit to receive gas from over the platform. The inlet unit includes a multi-chamber plenum, a gas inlet, and a gas distribution module. The multi-chamber plenum has a plurality of vertically stacked chambers that are fluidically connected, with a first chamber of the plurality of vertically stacked chambers positioned at a higher elevation than a collection chamber of the plurality of vertically stacked chambers.

公开(公告)号：US20220032258A1

公开(公告)日：2022-02-03

申请号：US17073111

申请日：2020-10-16

申请人： Applied Materials, Inc

发明人： Govindraj Desai ,  Sekar Krishnasamy ,  Sumedh Acharya ,  Dakshalkumar Patel ,  Jonathan Frankel ,  Quoc Truong ,  Mario Cambron ,  Ravindra Patil

IPC分类号： B01J19/00 ,  B05D1/00 ,  B05C19/02 ,  B05C19/00 ,  B01J8/00

摘要： A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a chemical delivery system, and a paddle assembly. The paddle assembly includes a rotatable drive shaft and a first plurality of paddles and a second plurality of paddles that extend radially from the drive shaft. The spacing, cross-sections, and oblique angles of the paddles are such that orbiting of the paddles causes the first plurality of paddles and the second plurality of paddles to displace substantially equal volumes in opposite directions in the lower portion of the stationary vacuum chamber.

公开(公告)号：US11154935B2

公开(公告)日：2021-10-26

申请号：US16428784

申请日：2019-05-31

申请人： Applied Materials, Inc.

发明人： Bahubali S. Upadhye ,  Sumedh Acharya ,  Sandip Desai ,  David Masayuki Ishikawa ,  Eric Ng ,  Hou T. Ng

IPC分类号： B22F12/00 ,  B33Y30/00 ,  B23K26/342 ,  B33Y40/00 ,  B22F10/10

摘要： An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material on the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife supply unit. The air knife supply unit includes a tube having a plurality of holes spaced along a length of the tube, a multi-fluted helical screw positioned in the tube, a gas inlet configured to supply a gas into an end of the tube with the screw configured to guide the gas from the gas inlet through the tube and out the holes, and a spiral plenum surrounding the tube with the spiral plenum including an inner end to receive gas from the holes and an outer end to deliver the gas over the platform.

公开(公告)号：US20220281168A1

公开(公告)日：2022-09-08

申请号：US17751536

申请日：2022-05-23

申请人： Applied Materials, Inc.

发明人： Dakshalkumar Patel ,  Girish Kumar Chaturvedi ,  Bahubali S. Upadhye ,  Sumedh Acharya ,  Mahendran Chidambaram ,  Nilesh Chimanrao Bagul

IPC分类号： B29C64/20 ,  B29C64/35 ,  B29C64/371

摘要： An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife assembly.
The air knife assembly includes an inlet unit to deliver gas over the platform and an exhaust unit to receive gas from over the platform. The exhaust unit includes a plenum having a port connected to a gas return conduit, and a gas collector that is open at a front end to receive gas from over the platform and has a concave plate at a back end of the gas collector. An aperture is formed at a back of the concave plate between the gas collector and the plenum to provide a constricted flow path for gas from the collector to the plenum.

公开(公告)号：US20220016712A1

公开(公告)日：2022-01-20

申请号：US17491332

申请日：2021-09-30

申请人： Applied Materials, Inc.

发明人： Bahubali S. Upadhye ,  Sumedh Acharya ,  Sandip Desai ,  David Masayuki Ishikawa ,  Eric Ng ,  Hou T. Ng

IPC分类号： B22F12/00 ,  B33Y30/00 ,  B23K26/342 ,  B33Y40/00

摘要： An additive manufacturing apparatus includes a platform, a dispenser to deliver a layers of feed material onto the platform, one or more light sources to generate a first light beam and a plurality of second light beams, a galvo mirror scanner to scan the first light beam on a layer of feed material on the platform, and a plurality of polygon mirror scanners. The galvo mirror scanner has a first field of view that spans a width of a build area of the platform, whereas, each of the plurality of polygon mirror scanners having a second field of view with the plurality of polygon mirror scanners providing a plurality of second fields of view. Each second field of view is a portion of the first field of view, and the plurality of polygon mirror scanners are positioned such that the plurality of second fields of view span the width of the build area of the platform.

公开(公告)号：US20210094234A1

公开(公告)日：2021-04-01

申请号：US16684524

申请日：2019-11-14

申请人： Applied Materials, Inc.

发明人： Dakshalkumar Patel ,  Girish Kumar Chaturvedi ,  Bahubali S. Upadhye ,  Sumedh Acharya ,  Mahendran Chidambaram ,  Nilesh Chimanrao Bagul

IPC分类号： B29C64/35 ,  B29C64/245 ,  B29C64/205 ,  B29C64/268

摘要： An additive manufacturing apparatus includes a platform, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform, at least one energy source to selectively fuse feed material in a layer on the platform, and an air knife assembly. The air knife assembly includes an inlet unit to deliver gas over the platform and an exhaust unit to receive gas from over the platform. The inlet unit includes a multi-chamber plenum, a gas inlet, and a gas distribution module. The multi-chamber plenum has a plurality of vertically stacked chambers that are fluidically connected, with a first chamber of the plurality of vertically stacked chambers positioned at a higher elevation than a collection chamber of the plurality of vertically stacked chambers.

公开(公告)号：US20210094229A1

公开(公告)日：2021-04-01

申请号：US16684519

申请日：2019-11-14

申请人： Applied Materials, Inc.

发明人： Dakshalkumar Patel ,  Girish Kumar Chaturvedi ,  Bahubali S. Upadhye ,  Sumedh Acharya ,  Mahendran Chidambaram ,  Nilesh Chimanrao Bagul

IPC分类号： B29C64/205 ,  B29C64/264 ,  B29C64/245 ,  B29C64/241 ,  B29C64/255

摘要： An additive manufacturing apparatus includes an environmentally sealed first chamber, a second chamber separated from the first chamber by a first valve, a platform positionable in the first chamber, a dispenser configured to deliver a plurality of successive layers of feed material onto the platform in the first chamber, at least one energy source to selectively fuse feed material in a layer on the platform in the first chamber, and an air knife assembly to direct a laminar flow of air across a layer of feed material on the platform in the first chamber. The air knife assembly includes an inlet module and an exhaust module that are movable through the first valve between the first chamber and the second chamber.