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公开(公告)号：US20220364575A1
公开(公告)日：2022-11-17
申请号：US17873706
申请日：2022-07-26
摘要： Pumping liners for process chambers including a first ring-shaped body and a second ring-shaped body are described. The first ring-shaped body has a first plurality of openings and the second ring-shaped body has a second plurality of openings. The first ring-shaped body and the second ring-shaped body are rotatable relative to each other around a central axis to at least partially overlap the first plurality of openings and the second plurality of openings to change the area of conductance through the openings. Methods of removing gases from a processing chamber are also described.
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公开(公告)号：US20220356572A1
公开(公告)日：2022-11-10
申请号：US17739843
申请日：2022-05-09
摘要： Pump liners and process chambers with the pump liners are described. The pump liner has a ring-shaped body with an annular wall enclosing a process region. A plurality of circumferentially spaced openings provide fluid communication through the annular wall between the process region and a region outside of the ring-shaped body. Each of the plurality of circumferentially spaced openings has a self-adjusting valve assembly. Self-adjusting valves and processing methods are also described.
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公开(公告)号：US20200378402A1
公开(公告)日：2020-12-03
申请号：US16886088
申请日：2020-05-28
摘要： Pumping liners for process chambers including a first ring-shaped body and a second ring-shaped body are described. The first ring-shaped body has a first plurality of openings and the second ring-shaped body has a second plurality of openings. The first ring-shaped body and the second ring-shaped body are rotatable relative to each other around a central axis to at least partially overlap the first plurality of openings and the second plurality of openings to change the area of conductance through the openings. Methods of removing gases from a processing chamber are also described.
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公开(公告)号：US20200377998A1
公开(公告)日：2020-12-03
申请号：US16886104
申请日：2020-05-28
摘要： Pumping liners for process chambers with slit openings are described. The pumping liners have a ring-shaped body with inner and outer walls. An annular upper channel is formed in the upper portion of the outer wall. The upper channel has a plurality of openings with a height, each opening having an independent width. A lower channel is formed in the lower portion of the outer wall and is separated from the upper channel by a partition. The lower channel is in fluid communication with the upper channel through at least one passage in the partition. A slit valve opening is in the lower portion of the body forming an opening in the outer wall and the inner wall.
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公开(公告)号：US10704142B2
公开(公告)日：2020-07-07
申请号：US15661441
申请日：2017-07-27
发明人： Muhannad Mustafa , Muhammad M. Rasheed , Mario Dan Sanchez , Yu Chang , William Kuang , Vinod Konda Purathe , Manjunatha Koppa
IPC分类号： C23C16/455 , G01K7/16 , C23C16/46 , G01K13/08 , G01K1/14 , C23C16/458
摘要： Embodiments of the present disclosure are directed to a quick disconnect resistance temperature detector (RTD) heater assembly, that includes a first assembly comprising a pedestal, a pedestal shaft, an adapter, one or more heater power supply terminals, and at least one RTD, and a second assembly comprising a rotating module having a central opening, and a cable assembly partially disposed in the central opening and securely fastened to the rotating module, wherein the first assembly is removably coupled to the second assembly, wherein the cable assembly includes one or more power supply sockets that receive the heater power supply terminals when the first and second assemblies are coupled together, and wherein the cable assembly includes one or more spring loaded RTD pins that contact the at least one RTD disposed in the first assembly when the first and second assemblies are coupled together.
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公开(公告)号：US20220389585A1
公开(公告)日：2022-12-08
申请号：US17889930
申请日：2022-08-17
IPC分类号： C23C16/455 , C23C16/52 , C23C16/50
摘要： Process chamber lids, processing chambers and methods using the lids are described. The lid includes a pumping liner with a showerhead, blocker plate and gas funnel positioned therein. A liner heater is positioned on the pumping liner to control temperature in the pumping liner. Gas is flowed into the gas funnel using a dead-volume free one-way valve with a remote plasma source.
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公开(公告)号：US11447866B2
公开(公告)日：2022-09-20
申请号：US17350073
申请日：2021-06-17
IPC分类号： C23C16/40 , C23C16/455 , C23C16/52 , C23C16/50
摘要： Process chamber lids, processing chambers and methods using the lids are described. The lid includes a pumping liner with a showerhead, blocker plate and gas funnel positioned therein. A liner heater is positioned on the pumping liner to control temperature in the pumping liner. Gas is flowed into the gas funnel using a dead-volume free one-way valve with a remote plasma source.
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公开(公告)号：US11420217B2
公开(公告)日：2022-08-23
申请号：US16721724
申请日：2019-12-19
IPC分类号： C23C16/40 , B05B1/18 , B05B1/00 , C23C16/455 , C23C16/458 , H01L21/687
摘要： Embodiments of showerheads for use in a process chamber are provided herein. In some embodiments, a showerhead includes a first spiral channel extending from a central region to a peripheral region of the showerhead; a second spiral channel extending from a central region to a peripheral region of the showerhead, wherein the second spiral channel is interleaved with the first spiral channel and fluidly independent from the first spiral channel; a plurality of first channels extending from the first spiral channel to a plurality of first gas distribution holes on a lower surface of the showerhead, wherein each first channel is a singular channel extending at an angle; and a plurality of second channels extending from the second spiral channel to a plurality of second gas distribution holes on the lower surface of the showerhead, wherein each second channel is a singular channel extending at an angle.
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公开(公告)号：US11415147B2
公开(公告)日：2022-08-16
申请号：US16886088
申请日：2020-05-28
摘要： Pumping liners for process chambers including a first ring-shaped body and a second ring-shaped body are described. The first ring-shaped body has a first plurality of openings and the second ring-shaped body has a second plurality of openings. The first ring-shaped body and the second ring-shaped body are rotatable relative to each other around a central axis to at least partially overlap the first plurality of openings and the second plurality of openings to change the area of conductance through the openings. Methods of removing gases from a processing chamber are also described.
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公开(公告)号：US11186910B2
公开(公告)日：2021-11-30
申请号：US16568612
申请日：2019-09-12
IPC分类号： C23C16/40 , C23C16/455 , H01L21/67 , H01L21/02
摘要： Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The delivery channel is separated into a plurality of zones by partitions. Each of the plurality of zones has an inlet and an outlet.
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