- 专利标题: Showerhead for ALD precursor delivery
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申请号: US16721724申请日: 2019-12-19
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公开(公告)号: US11420217B2公开(公告)日: 2022-08-23
- 发明人: Muhannad Mustafa , Muhammad M. Rasheed
- 申请人: APPLIED MATERIALS, INC.
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Moser Taboada
- 主分类号: C23C16/40
- IPC分类号: C23C16/40 ; B05B1/18 ; B05B1/00 ; C23C16/455 ; C23C16/458 ; H01L21/687
摘要:
Embodiments of showerheads for use in a process chamber are provided herein. In some embodiments, a showerhead includes a first spiral channel extending from a central region to a peripheral region of the showerhead; a second spiral channel extending from a central region to a peripheral region of the showerhead, wherein the second spiral channel is interleaved with the first spiral channel and fluidly independent from the first spiral channel; a plurality of first channels extending from the first spiral channel to a plurality of first gas distribution holes on a lower surface of the showerhead, wherein each first channel is a singular channel extending at an angle; and a plurality of second channels extending from the second spiral channel to a plurality of second gas distribution holes on the lower surface of the showerhead, wherein each second channel is a singular channel extending at an angle.
公开/授权文献
- US20210187521A1 SHOWERHEAD FOR ALD PRECURSOR DELIVERY 公开/授权日:2021-06-24
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