Abstract:
Obtaining previously a relation between a crystallization temperature and a physical property and a relation between a physical property parameter and the physical property of a glass ceramic, measuring the physical property parameter with respect to the glass ceramic sampled from a manufacturing line of the glass ceramic and controlling an actual crystallization temperature based on the relations so that the manufactured glass ceramic has the desired physical property value.
Abstract:
The present invention relates to a pressure-sensitive adhesive tape for battery containing: a substrate and a pressure-sensitive adhesive layer laminated on at least one surface of a substrate, in which the pressure-sensitive adhesive layer is laminated on the substrate, 0.5 mm or more inside from both edges of the substrate, and in which the pressure-sensitive adhesive tape has a 180° peeling pressure-sensitive adhesive force at 23° C. being 0.1 N/10 mm or more, and has a slippage distance after a pressure-sensitive adhesive layer side of the pressure-sensitive adhesive tape is attached to a phenolic resin plate (attaching area: 10 mm×20 mm), followed by applying a load of 500 g thereto at 40° C. for 1 hour being 0.2 mm or less.
Abstract:
The present invention relates to a pressure-sensitive adhesive tape for battery containing: a substrate; and a pressure-sensitive adhesive layer provided on at least one side of the substrate, in which the pressure-sensitive adhesive tape has a thickness change ratio of 20% or less after immersion in a mixed solvent of ethylene carbonate/diethyl carbonate [former/latter (volume ratio)=1/1] at 60° C. for 8 hours; and a 180° peeling adhesive strength (against aluminum foil, peel temperature: 25° C., peel rate: 300 mm/minute) of 0.5 N/10 mm or more after the above immersion.
Abstract:
An exposure system for exposing a substrate to radiation is disclosed. The system comprises an exposure unit configured to expose the substrate to radiation, an exposure chamber configured to accommodate the exposure unit, an alignment measurement unit arranged outside the exposure chamber and configured to measure a position of an alignment mark on the substrate, and a load-lock chamber arranged between the exposure chamber and the alignment measurement unit.
Abstract:
An exposure apparatus which exposes a pattern of an original onto a substrate through a projection optical system with a space between the projection optical system and the substrate filled with liquid. The apparatus includes a liquid supply nozzle configured to supply the liquid to the space through a liquid supply opening, a liquid supply unit configured to supply the liquid into the liquid supply nozzle, a liquid recovery unit configured to recover the liquid in the liquid supply nozzle by using a vacuum source, and a gas supply unit configured to supply a gas into the liquid supply nozzle through a pipe connected to the liquid supply opening of the liquid supply nozzle. A gas supply by the gas supply unit is started and a liquid recovery by the liquid recovery unit is started while a liquid supply by the liquid supply unit is stopped.
Abstract:
An exposure system for exposing a substrate to radiation is disclosed. The system comprises an exposure unit configured to expose the substrate to radiation, an exposure chamber configured to accommodate the exposure unit, an alignment measurement unit arranged outside the exposure chamber and configured to measure a position of an alignment mark on the substrate, and a load-lock chamber arranged between the exposure chamber and the alignment measurement unit.
Abstract:
An apparatus for processing an article in order to manufacture a device includes a process chamber in which the article is processed; a relay chamber; a first load-lock chamber disposed between an outside of the apparatus and the relay chamber; a second load-lock chamber disposed between the relay chamber and the process chamber; a first adjusting mechanism configured to adjust atmosphere in the process chamber to a first atmosphere; and a second adjusting mechanism configured to adjust atmosphere in the relay chamber to a second atmosphere that is an intermediate atmosphere between the first atmosphere and atmosphere of the outside.
Abstract:
The present invention relates to a pressure-sensitive adhesive tape for battery containing: a substrate; and a pressure-sensitive adhesive layer provided on at least one side of the substrate, in which the pressure-sensitive adhesive tape has a thickness change ratio of 20% or less after immersion in a mixed solvent of ethylene carbonate/diethyl carbonate [former/latter (volume ratio)=1/1] at 60° C. for 8 hours; and a 180° peeling adhesive strength (against aluminum foil, peel temperature: 25° C., peel rate: 300 mm/minute) of 0.5 N/10 mm or more after the above immersion.
Abstract:
A seal member is attached to a cover which occludes a gear case as a housing unit. The seal member is formed of elastomer and integrally formed with: a plate-shaped portion formed into a disc shape which covers the inner surface of the cover; an inner seal portion which is positioned on the inner peripheral edge of a through-hole, and comes into sliding contact with the outer peripheral surface of an output member; an outer seal portion which is positioned on the periphery of the cover, and comes into contact with the opening end of the housing unit; and anchor portions which latch onto the front surface of the cover via mounting holes provided to the cover. The boundary between the seal member and the cover extends only to the outside of the gear case, and does not extend to the inside of the gear case.
Abstract:
A seal member is attached to a cover which occludes a gear case as a housing unit. The seal member is formed of elastomer and integrally formed with: a plate-shaped portion formed into a disc shape which covers the inner surface of the cover; an inner seal portion which is positioned on the inner peripheral edge of a through-hole, and comes into sliding contact with the outer peripheral surface of an output member; an outer seal portion which is positioned on the periphery of the cover, and comes into contact with the opening end of the housing unit; and anchor portions which latch onto the front surface of the cover via mounting holes provided to the cover. The boundary between the seal member and the cover extends only to the outside of the gear case, and does not extend to the inside of the gear case.