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    Two-stage, slow-start valve apparatus
    1.
    发明授权
    Two-stage, slow-start valve apparatus 有权
    两级缓慢启动阀门装置

    公开(公告)号：US08671987B2

    公开(公告)日：2014-03-18

    申请号：US12968551

    申请日：2010-12-15

    Applicant: Youfan Gu ,  David Neumeister ,  Kevin Grout

    Inventor： Youfan Gu ,  David Neumeister ,  Kevin Grout

    IPC: F16K1/52

    CPC classification number: F16K1/52 ,  F16K31/1225 ,  F16K31/1226 ,  F16K39/024 ,  F16K51/02 ,  H01L21/67017 ,  Y10T137/0318 ,  Y10T137/86944

    Abstract: A two-stage, slow-start valve includes a minor valve assembly inside a major valve closure member of a major valve closure assembly so that fluid can flow through the valve at a higher rate by opening the major valve assembly or at a lower rate by opening the minor valve assembly while the major valve closure assembly is closed in order to allow fluid to flow in an alternate flow path through the major valve closure member. The example minor valve closure assembly has a minor valve closure member that is actuated to open by a minor valve piston on which minor valve actuating fluid is applied to the minor piston via a diaphragm seal positioned between the minor piston and the minor valve actuating fluid. Both the major valve closure assembly and the minor valve closure assembly can be pneumatically actuated to open.

    Abstract translation: 两级缓慢启动阀包括在主阀闭合组件的主阀闭合构件内部的次阀组件，使得流体可以通过打开主阀组件或以较低的速率以较高的速率流过阀， 打开小阀组件，同时关闭主阀闭合组件，以允许流体在通过主阀闭合构件的交替流动路径中流动。 示例性小阀闭合组件具有次阀闭合构件，其被致动以由次阀活塞打开，小次阀致动流体通过位于次活塞和次阀致动流体之间的隔膜密封件施加到次活塞。 主阀闭合组件和次阀闭合组件都可气动致动以打开。

    Integrated absolute and differential pressure transducer
    2.
    发明授权
    Integrated absolute and differential pressure transducer 有权
    集成的绝对和差压传感器

    公开(公告)号：US07477996B2

    公开(公告)日：2009-01-13

    申请号：US11759202

    申请日：2007-06-06

    Applicant: Paul Dozoretz ,  Youfan Gu ,  Garry Holcomb ,  Ole Wenzel

    Inventor： Paul Dozoretz ,  Youfan Gu ,  Garry Holcomb ,  Ole Wenzel

    IPC: G01F23/14

    CPC classification number: G01L13/00 ,  G01L15/00 ,  G01L27/005

    Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.

    Abstract translation: 一种方法和装置集成差压测量和绝对压力测量，以在单个集成尺度上的宽范围的压力下提供连续的绝对压力分布。 获得绝对压力测量和差压测量，并确定绝对压力测量值和差压测量值之间的相关系数。 相关因子用于在绝对压力测量下，将公差绝对压力刻度上的压差测量值归一化到虚拟绝对压力值。 在宽压力范围内的绝对压力分布包括在绝对压力测量精确的范围的一部分范围内的绝对压力测量，并且其包括压差测量值准确的范围的另一部分中的虚拟绝对压力值。

    Method and apparatus for preventing ALD reactants from damaging vacuum pumps
    5.
    发明授权
    Method and apparatus for preventing ALD reactants from damaging vacuum pumps 有权
    用于防止ALD反应物损坏真空泵的方法和装置

    公开(公告)号：US08679287B2

    公开(公告)日：2014-03-25

    申请号：US11136610

    申请日：2005-05-23

    Applicant: Youfan Gu ,  David Neumeister

    Inventor： Youfan Gu ,  David Neumeister

    IPC: H01L21/443

    CPC classification number: C23C16/45544 ,  C23C16/4412

    Abstract: A secondary reaction chamber with a mesh reactor element and a heater assembly are positioned in a foreline between a CVD reaction chamber and a vacuum pump to mix and react all previously unreacted precursor reactants to remove them from the effluent before they can reach and damage the vacuum pump.

    Abstract translation: 具有网状反应器元件和加热器组件的二次反应室定位在CVD反应室和真空泵之间的前级管线中，以混合并反应所有先前未反应的前体反应物，以将它们从流出物中除去，然后它们可以达到并损坏真空 泵。

    Fast-acting pneumatic diaphragm valve
    6.
    发明授权
    Fast-acting pneumatic diaphragm valve 有权
    快速气动隔膜阀

    公开(公告)号：US08172197B2

    公开(公告)日：2012-05-08

    申请号：US11456044

    申请日：2006-07-06

    Applicant: Youfan Gu ,  Sven Nuesken

    Inventor： Youfan Gu ,  Sven Nuesken

    IPC: F16K31/12

    CPC classification number: F16K31/406 ,  F16K7/17 ,  Y10T137/86614 ,  Y10T137/86686 ,  Y10T137/86919

    Abstract: A fast-acting, pneumatic diaphragm valve includes a diaphragm valve closure member, a pneumatic piston that provides a closure force on the closure member, and a solenoid pilot valve that controls pressurized air to the piston to cause the piston to move in a reciprocal manner so that the closure member opens and closes the valve. The valve seat seal can be elastomer for enhancing speed, and the solenoid pilot valve can be positioned and configured with air flow longitudinally through or past the solenoid armature to enhance speed.

    Abstract translation: 快速作用的气动隔膜阀包括隔膜阀关闭构件，在关闭构件上提供闭合力的气动活塞，以及控制对活塞的加压空气以使活塞以往往的方式移动的螺线管先导阀 使得封闭构件打开和关闭阀。 阀座密封件可以是用于提高速度的弹性体，并且电磁导阀可以被定位和配置为沿着螺线管电枢纵向通过或经过螺线管电枢的气流，以提高速度。

    Reactive chemical containment system
    8.
    发明授权
    Reactive chemical containment system 有权
    反应性化学品容纳系统

    公开(公告)号：US07871587B2

    公开(公告)日：2011-01-18

    申请号：US12645455

    申请日：2009-12-22

    Applicant: Youfan Gu ,  Paul Dozoretz

    Inventor： Youfan Gu ,  Paul Dozoretz

    IPC: B01D53/38 ,  B01D53/68 ,  B01D53/76

    CPC classification number: C23C16/4412 ,  B01D53/76 ,  B01D2251/102 ,  B01D2251/11 ,  B01D2257/204 ,  B01D2258/0216 ,  B01F3/02 ,  B01F5/0682 ,  B01F5/0688 ,  B01F5/0692 ,  B01F5/0693 ,  B01F5/0694 ,  Y02C20/30

    Abstract: A small scale, but effective, reactive chemical containment system includes apparatus and methods for reaction of process gases exhausted from reaction furnaces with a reactant gas in a non-combustible manner to produce and contain particulate or powder byproducts, thereby removing the process gas from the exhaust gas flow. The apparatus provides process gas inlet, treatment reactive gas diffusion, process gas and treatment reactive gas pre-mixing, primary containment, secondary containment, and outlet zones.

    Abstract translation: 小规模但有效的反应性化学容纳系统包括用于使从反应炉排出的处理气体与不可燃方式的反应气体反应的装置和方法，以产生和容纳颗粒或粉末副产物，从而将工艺气体从 废气流。 该设备提供工艺气体入口，处理反应气体扩散，工艺气体和处理反应气体预混合，初级容纳，二次容纳和出口区。

    FAST-ACTING PNEUMATIC DIAPHRAGM VALVE
    9.
    发明申请
    FAST-ACTING PNEUMATIC DIAPHRAGM VALVE 有权
    快速气动膜片阀

    公开(公告)号：US20080023661A1

    公开(公告)日：2008-01-31

    申请号：US11456044

    申请日：2006-07-06

    Applicant: Youfan Gu ,  Sven Nuesken

    Inventor： Youfan Gu ,  Sven Nuesken

    IPC: F16K31/12

    CPC classification number: F16K31/406 ,  F16K7/17 ,  Y10T137/86614 ,  Y10T137/86686 ,  Y10T137/86919

    Abstract: A fast-acting, pneumatic diaphragm valve includes a diaphragm valve closure member, a pneumatic piston that provides a closure force on the closure member, and a solenoid pilot valve that controls pressurized air to the piston to cause the piston to move in a reciprocal manner so that the closure member opens and closes the valve. The valve seat seal can be elastomer for enhancing speed, and the solenoid pilot valve can be positioned and configured with air flow longitudinally through or past the solenoid armature to enhance speed.

    Abstract translation: 快速作用的气动隔膜阀包括隔膜阀关闭构件，在关闭构件上提供闭合力的气动活塞，以及控制对活塞的加压空气以使活塞以往往的方式移动的螺线管先导阀 使得封闭构件打开和关闭阀。 阀座密封件可以是用于提高速度的弹性体，并且电磁导阀可以被定位和配置为沿着螺线管电枢纵向通过或经过螺线管电枢的气流，以提高速度。

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