Method of manufacturing semiconductor device
    1.
    发明授权
    Method of manufacturing semiconductor device 失效
    制造半导体器件的方法

    公开(公告)号:US08039390B2

    公开(公告)日:2011-10-18

    申请号:US12535665

    申请日:2009-08-04

    IPC分类号: H01L21/68

    摘要: The method of manufacturing a semiconductor device according to the present invention includes: a groove forming step of forming a groove in an insulating layer made of an insulating material containing Si and O; an alloy film applying step of covering the side surface and the bottom surface of the groove with an alloy film made of an alloy material containing Cu and Mn by sputtering; a thinning step of reducing the thickness of a portion of the alloy film covering the bottom surface of the groove; a wire forming step of forming a Cu wire made of a metallic material mainly composed of Cu in the groove after the thinning step; and a barrier film forming step of forming a barrier film made of MnSiO between the Cu wire and the insulating layer by heat treatment.

    摘要翻译: 根据本发明的制造半导体器件的方法包括:沟槽形成步骤,在由含有Si和O的绝缘材料制成的绝缘层中形成沟槽; 合金膜施加步骤,用溅射对含有Cu和Mn的合金材料制成的合金膜覆盖槽的侧面和底面; 减薄覆盖槽的底面的合金膜的一部分的厚度的薄化步骤; 线形成步骤,在所述变薄步骤之后,在所述槽中形成由主要由Cu构成的金属材料制成的Cu线; 以及通过热处理在Cu线和绝缘层之间形成由MnSiO制成的阻挡膜的阻挡膜形成步骤。

    Aluminum type plated steel sheet and heat shrink band using the same
    2.
    发明授权
    Aluminum type plated steel sheet and heat shrink band using the same 有权
    铝型电镀钢板和使用其的热收缩带

    公开(公告)号:US07968210B2

    公开(公告)日:2011-06-28

    申请号:US11815834

    申请日:2006-02-09

    IPC分类号: B32B15/18 B32B15/20

    摘要: An exemplary embodiment of an aluminum type plated steel sheet which excels in discoloration resistance, and weldability, which does not decorate after re-heating and which can prevent increasing of strength, and a heat shrink band using the same are provided. For example, the heat shrink band can be made of an aluminum type plated steel sheet consisting of a steel sheet being composed of, e.g., not more than about 0.005 mass % of C; not more than about 0.005 mass % of N; not less than about 0.1 mass % and not more than about 0.5 mass % of Si; not more than about 0.1 mass % of P; not more than about 0.02 mass % of S; not less than about 1.05 mass % and not more than 2.0 mass % of Mn; not more than 1.0 mass % of sol Al; a residual amount of Fe and inevitable impurities, and an aluminum type plated layer mainly consisting of Al being deposited thereon. Such exemplary sheet can be prevented from a discoloration upon, e.g., being re-heated at a temperature of not less than about 500° C. to not more than about 700° C.

    摘要翻译: 提供了耐变色性优异的铝型电镀钢板的示例性实施例,以及再加热后不能装饰并且可以防止强度增加的可焊性,以及使用其的热收缩带。 例如,热收缩带可以由由例如不超过约0.005质量%的C构成的钢板构成的铝型电镀钢板制成, 不超过约0.005质量%的N; 不小于约0.1质量%且不大于约0.5质量%的Si; 不大于约0.1质量%的P; 不超过约0.02质量%的S; 不小于1.05质量%且不大于2.0质量%的Mn; 不大于1.0质量%的溶胶Al; 残余量的Fe和不可避免的杂质,以及主要由Al沉积的铝型镀层。 可以防止例如在不低于约500℃至不超过约700℃的温度下再加热时的变色。

    ALUMINUM TYPE PLATED STEEL SHEET AND HEAT SHRINK BAND USING THE SAME
    4.
    发明申请
    ALUMINUM TYPE PLATED STEEL SHEET AND HEAT SHRINK BAND USING THE SAME 有权
    铝型钢板和使用它的热收缩带

    公开(公告)号:US20090011275A1

    公开(公告)日:2009-01-08

    申请号:US11815834

    申请日:2006-02-09

    IPC分类号: B32B15/01

    摘要: An exemplary embodiment of an aluminum type plated steel sheet which excels in discoloration resistance, and weldability, which does not decorate after re-heating and which can prevent increasing of strength, and a heat shrink band using the same are provided. For example, the heat shrink band can be made of an aluminum type plated steel sheet consisting of a steel sheet being composed of, e.g., not more than about 0.005 mass % of C; not more than about 0.005 mass % of N; not less than about 0.1 mass % and not more than about 0.5 mass % of Si; not more than about 0.1 mass % of P; not more than about 0.02 mass % of S; not less than about 1.05 mass % and not more than 2.0 mass % of Mn; not more than 1.0 mass % of sol Al; a residual amount of Fe and inevitable impurities, and an aluminum type plated layer mainly consisting of Al being deposited thereon. Such exemplary sheet can be prevented from a discoloration upon, e.g., being re-heated at a temperature of not less than about 500° C. to not more than about 700° C.

    摘要翻译: 提供了耐变色性优异的铝型电镀钢板的示例性实施例,以及再加热后不能装饰并且可以防止强度增加的可焊性,以及使用其的热收缩带。 例如,热收缩带可以由由例如不超过约0.005质量%的C构成的钢板构成的铝型电镀钢板制成, 不超过约0.005质量%的N; 不小于约0.1质量%且不大于约0.5质量%的Si; 不大于约0.1质量%的P; 不超过约0.02质量%的S; 不小于1.05质量%且不大于2.0质量%的Mn; 不大于1.0质量%的溶胶Al; 残余量的Fe和不可避免的杂质,以及主要由Al沉积的铝型镀层。 可以防止例如在不低于约500℃至不超过约700℃的温度下再加热时的变色。

    High-strength hot-dip galvanized steel sheet and method for producing the same
    5.
    发明授权
    High-strength hot-dip galvanized steel sheet and method for producing the same 有权
    高强度热浸镀锌钢板及其制造方法

    公开(公告)号:US07736449B2

    公开(公告)日:2010-06-15

    申请号:US11977537

    申请日:2007-10-24

    IPC分类号: C23C2/28

    摘要: The present invention stably provides a high-strength hot-dip galvanized steel sheet having a high tensile strength and no non-plated portions and being excellent in workability and surface properties even when the employed equipment has only a reduction annealing furnace and a steel sheet containing relatively large amounts of Si, Mn and Al that are regarded as likely to cause non-plated portions is used as the substrate. The present invention: secures good plating performance even when the steel sheet contains Si, Mn and Al by adding Ni to a steel sheet, thus forming oxides at some portions in the steel sheet surface layer, and resultantly suppressing the surface incrassation of Si, Mn and Al at the portions where oxides are not formed; enhances the effect of Ni and accelerates the formation of oxides by further adding Mo, Cu and Sn; and moreover, in the case of a TRIP steel sheet, secures austenite by determining the ranges of Si and Al strictly, avoiding the deterioration of plating performance caused by the addition of Ni, and further adding Mo in a balanced manner.In addition, the present invention, in a TRIP steel sheet, improves press formability by regulating a retained austenite ratio and accelerates the formation of oxides by regulating a hydrogen concentration and a dew point in annealing before plating.

    摘要翻译: 本发明稳定地提供了具有高拉伸强度和无镀层部分的高强度热浸镀锌钢板,并且即使所用设备仅具有还原退火炉和含有 被认为可能引起非电镀部分的相对大量的Si,Mn和Al被用作衬底。 本发明:即使在钢板中含有Si,Mn和Al的钢板中也添加了Ni,从而在钢板表面层的某些部分形成氧化物,也可以确保良好的镀层性,从而抑制Si,Mn 和Al在不形成氧化物的部分; 通过进一步添加Mo,Cu和Sn,增强Ni的作用并加速氧化物的形成; 此外,在TRIP钢板的情况下,通过严格地确定Si和Al的范围来确保奥氏体,避免由于添加Ni而引起的电镀性能的劣化,并且进一步以平衡的方式添加Mo。 此外,本发明在TRIP钢板中,通过调节残留奥氏体比例,通过调节镀层前退火时的氢浓度和露点来促进氧化物的形成,提高冲压成形性。

    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    6.
    发明申请
    METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 失效
    制造半导体器件的方法

    公开(公告)号:US20100035428A1

    公开(公告)日:2010-02-11

    申请号:US12535665

    申请日:2009-08-04

    IPC分类号: H01L21/768

    摘要: The method of manufacturing a semiconductor device according to the present invention includes: a groove forming step of forming a groove in an insulating layer made of an insulating material containing Si and O; an alloy film applying step of covering the side surface and the bottom surface of the groove with an alloy film made of an alloy material containing Cu and Mn by sputtering; a thinning step of reducing the thickness of a portion of the alloy film covering the bottom surface of the groove; a wire forming step of forming a Cu wire made of a metallic material mainly composed of Cu in the groove after the thinning step; and a barrier film forming step of forming a barrier film made of MnSiO between the Cu wire and the insulating layer by heat treatment.

    摘要翻译: 根据本发明的制造半导体器件的方法包括:沟槽形成步骤,在由含有Si和O的绝缘材料制成的绝缘层中形成沟槽; 合金膜施加步骤,用溅射对含有Cu和Mn的合金材料制成的合金膜覆盖槽的侧面和底面; 减薄覆盖槽的底面的合金膜的一部分的厚度的薄化步骤; 线形成步骤,在所述变薄步骤之后,在所述槽中形成由主要由Cu构成的金属材料制成的Cu线; 以及通过热处理在Cu线和绝缘层之间形成由MnSiO制成的阻挡膜的阻挡膜形成步骤。

    Hot-dip zinc steel sheet having high strength and method for production thereof
    7.
    发明申请
    Hot-dip zinc steel sheet having high strength and method for production thereof 有权
    高强度热浸锌钢板及其制造方法

    公开(公告)号:US20060292391A1

    公开(公告)日:2006-12-28

    申请号:US10552668

    申请日:2004-03-30

    IPC分类号: B05D1/18 C25D5/10

    摘要: A molten zinc plated steel sheet superior in plating bondability and provided with both strength and shapeability is provided and a method of producing this molten zinc plating steel sheet by a continuous zinc plating production system which enables production at a low cost without modification of the system or addition of steps is provided, said molten zinc plated steel sheet characterized by comprising, by wt %, a steel sheet including C: 0.05 to 0.40%, Si: 0.2 to 3.0%, and Mn: 0.1 to 2.5%, the balance comprised of Fe and unavoidable impurities, having on its surface a Zn plating layer containing Al: 0.01 to 1% and the balance of Zn and unavoidable impurities and containing inside the steel sheet within 2 μm from the interface of said plating layer and steel sheet oxide particles of at least one type of oxide selected from an Al oxide, Si oxide, Mn oxide, or complex oxide comprised of at least two of Al, Si, and Mn.

    摘要翻译: 提供了具有优异的电镀结合能力并具有强度和成形性的熔融镀锌钢板,以及通过连续镀锌生产系统生产该熔融镀锌钢板的方法,其能够以低成本生产而不修改该系统或 提供了以下步骤:所述熔融镀锌钢板,其特征在于,以重量%计含有C:0.05〜0.40%,Si:0.2〜3.0%,Mn:0.1〜2.5%的钢板,余量由 Fe和不可避免的杂质,其表面上含有Al:0.01〜1%的Zn镀层和余量的Zn和不可避免的杂质,并且在钢板内部含有2μm以下的镀覆层和钢板氧化物粒子的界面 选自Al氧化物,Si氧化物,Mn氧化物或由Al,Si和Mn中的至少两种构成的复合氧化物中的至少一种氧化物。

    High-strength hop-dip galvanized steel sheet and method for producing the same
    8.
    发明申请
    High-strength hop-dip galvanized steel sheet and method for producing the same 有权
    高强度浸镀锌钢板及其制造方法

    公开(公告)号:US20060124907A1

    公开(公告)日:2006-06-15

    申请号:US10542393

    申请日:2004-01-15

    IPC分类号: H01B1/12

    摘要: The present invention stably provides a high-strength hot-dip galvanized steel sheet having a high tensile strength and no non-plated portions and being excellent in workability and surface properties even when the employed equipment has only a reduction annealing furnace and a steel sheet containing relatively large amounts of Si, Mn and Al that are regarded as likely to cause non-plated portions is used as the substrate. The present invention: secures good plating performance even when the steel sheet contains Si, Mn and Al by adding Ni to a steel sheet, thus forming oxides at some portions in the steel sheet surface layer, and resultantly suppressing the surface incrassation of Si, Mn and Al at the portions where oxides are not formed; enhances the effect of Ni and accelerates the formation of oxides by further adding Mo, Cu and Sn; and moreover, in the case of a TRIP steel sheet, secures austenite by determining the ranges of Si and Al strictly, avoiding the deterioration of plating performance caused by the addition of Ni, and further adding Mo in a balanced manner. In addition, the present invention, in a TRIP steel sheet, improves press formability by regulating a retained austenite ratio and accelerates the formation of oxides by regulating a hydrogen concentration and a dew point in annealing before plating.

    摘要翻译: 本发明稳定地提供了具有高拉伸强度和无镀层部分的高强度热浸镀锌钢板,并且即使所用设备仅具有还原退火炉和含有 被认为可能引起非电镀部分的相对大量的Si,Mn和Al被用作衬底。 本发明:即使在钢板中含有Si,Mn和Al的钢板中也添加了Ni,从而在钢板表面层的某些部分形成氧化物,也可以确保良好的镀层性,从而抑制Si,Mn 和Al在不形成氧化物的部分; 通过进一步添加Mo,Cu和Sn,增强Ni的作用并加速氧化物的形成; 此外,在TRIP钢板的情况下,通过严格地确定Si和Al的范围来确保奥氏体,避免由于添加Ni而引起的电镀性能的劣化,并且进一步以平衡的方式添加Mo。 此外,本发明在TRIP钢板中,通过调节残留奥氏体比例,通过调节镀层前退火时的氢浓度和露点来促进氧化物的形成,提高冲压成形性。

    High-strength hot-dip galvanized steel sheet and method for producing the same
    9.
    发明申请
    High-strength hot-dip galvanized steel sheet and method for producing the same 有权
    高强度热浸镀锌钢板及其制造方法

    公开(公告)号:US20080053576A1

    公开(公告)日:2008-03-06

    申请号:US11977537

    申请日:2007-10-24

    IPC分类号: C23C2/28

    摘要: The present invention stably provides a high-strength hot-dip galvanized steel sheet having a high tensile strength and no non-plated portions and being excellent in workability and surface properties even when the employed equipment has only a reduction annealing furnace and a steel sheet containing relatively large amounts of Si, Mn and Al that are regarded as likely to cause non-plated portions is used as the substrate. The present invention: secures good plating performance even when the steel sheet contains Si, Mn and Al by adding Ni to a steel sheet, thus forming oxides at some portions in the steel sheet surface layer, and resultantly suppressing the surface incrassation of Si, Mn and Al at the portions where oxides are not formed; enhances the effect of Ni and accelerates the formation of oxides by further adding Mo, Cu and Sn; and moreover, in the case of a TRIP steel sheet, secures austenite by determining the ranges of Si and Al strictly, avoiding the deterioration of plating performance caused by the addition of Ni, and further adding Mo in a balanced manner. In addition, the present invention, in a TRIP steel sheet, improves press formability by regulating a retained austenite ratio and accelerates the formation of oxides by regulating a hydrogen concentration and a dew point in annealing before plating.

    摘要翻译: 本发明稳定地提供了具有高拉伸强度和无镀层部分的高强度热浸镀锌钢板,并且即使所用设备仅具有还原退火炉和含有 被认为可能引起非电镀部分的相对大量的Si,Mn和Al被用作衬底。 本发明:即使在钢板中含有Si,Mn和Al的钢板中也添加了Ni,从而在钢板表面层的某些部分形成氧化物,也可以确保良好的镀层性,从而抑制Si,Mn 和Al在不形成氧化物的部分; 通过进一步添加Mo,Cu和Sn,增强Ni的作用并加速氧化物的形成; 此外,在TRIP钢板的情况下,通过严格地确定Si和Al的范围来确保奥氏体,避免由于添加Ni而引起的电镀性能的劣化,并且进一步以平衡的方式添加Mo。 此外,本发明在TRIP钢板中,通过调节残留奥氏体比例,通过调节镀层前退火时的氢浓度和露点来促进氧化物的形成,提高冲压成形性。

    Hot dip alloyed zinc coated steel sheet and method for production thereof
    10.
    发明申请
    Hot dip alloyed zinc coated steel sheet and method for production thereof 有权
    热浸镀锌钢板及其制造方法

    公开(公告)号:US20060269776A1

    公开(公告)日:2006-11-30

    申请号:US10551159

    申请日:2004-03-30

    IPC分类号: B05D1/18 C23C2/28 C25D5/10

    摘要: The present invention provides an alloyed molten zinc plated steel sheet having an area of the Fe and Zn alloy phase in the unformed parts in the plating layer of less than 10% of the area of the steel sheet as a whole and superior in strength and shapeability and a method of producing this alloyed molten zinc plating steel sheet by a continuous zinc plating production system which enables production at a low cost without modification of the system or addition of steps, said alloyed molten zinc plated steel sheet characterized by comprising a steel sheet including C: 0.05 to 0.40%, Si: 0.2 to 3.0%, and Mn: 0.1 to 2.5%, the balance comprised of Fe and unavoidable impurities, having on its surface a Zn alloy plating layer comprised of Fe in a concentration of 7 to 15 wt %, Al in a concentration of 0.01 to 1 wt %, and the balance of Zn and unavoidable impurities, said plating layer containing oxide particles of at least one type of oxide selected from an Al oxide, Si oxide, Mn oxide, and complex oxides of the same alone or in combination.

    摘要翻译: 本发明提供一种合金化的镀锌钢板,其镀层中未成形部分中的Fe和Zn合金相的面积小于钢板整体面积的10%,强度和成形性优良 以及通过连续镀锌生产系统生产该合金化熔融镀锌钢板的方法,其能够在不改变系统或添加步骤的情况下以低成本生产,所述合金化的镀锌钢板的特征在于包括: C:0.05〜0.40%,Si:0.2〜3.0%,Mn:0.1〜2.5%,余量由Fe和不可避免的杂质组成,其表面上含有浓度为7〜15的Fe的Zn合金镀层 重量%,Al为0.01〜1重量%的Al,余量由Zn和不可避免的杂质构成,所述镀层含有选自Al氧化物,Si氧化物,Mn氧化物中的至少一种氧化物的氧化物粒子,以及 相同的复合氧化物单独或组合使用。