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公开(公告)号:US5264190A
公开(公告)日:1993-11-23
申请号:US866489
申请日:1992-04-10
IPC分类号: C30B19/04 , C30B19/06 , H01L21/368
CPC分类号: H01L21/02625 , C30B19/04 , C30B19/063 , C30B29/48 , H01L21/02411 , H01L21/02562
摘要: An apparatus for liquid phase epitaxial film growth includes a mother boat for supporting a substrate, a melt boat slidable on the mother boat for containing a melt and selectively bringing the substrate and the melt into contact, and a lid for opening and closing the melt boat. The mother boat is disposed in a quartz tube and push rods extend into the tube for sliding the lid to open and close the melt boat.
摘要翻译: 一种用于液相外延膜生长的装置包括用于支撑基底的母船,可在母船上滑动以容纳熔体并且选择性地使基底和熔体接触的熔体舟和用于打开和关闭熔体舟的盖 。 母船设置在石英管中,推杆延伸到管中以滑动盖以打开和关闭熔体船。
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公开(公告)号:US4458233A
公开(公告)日:1984-07-03
申请号:US475972
申请日:1983-03-16
申请人: Yoshiharu Komine , Takao Sawada
发明人: Yoshiharu Komine , Takao Sawada
CPC分类号: G01N27/12
摘要: A gas sensing element made of a gas sensing material composed of a composite oxide of titanium and niobium as the principal constituent, which is capable of measuring with high sensitivity and selectivity those gases such as hydrogen sulfide, methyl mercaptan, etc. issuing offensive odor, and alcohol, due to variations in electrical resistance of the material.
摘要翻译: 由以钛和铌的复合氧化物为主要成分的气体传感材料制成的气体传感元件,能够高灵敏度和高选择性地测量发出异味的气体如硫化氢,甲硫醇等, 和酒精,由于材料的电阻的变化。
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公开(公告)号:US4456902A
公开(公告)日:1984-06-26
申请号:US475949
申请日:1983-03-16
申请人: Yoshiharu Komine , Takao Sawada
发明人: Yoshiharu Komine , Takao Sawada
CPC分类号: G01N27/12 , G01N27/121
摘要: A gas and humidity sensing element in a single integral structure made of a base plate of apatite ceramics, on which a particular metal oxide such as tin oxide, zinc oxide, or composite oxide of titanium and niobium is provided. The sensing element has a function of sensing gas and humidity with outstanding sensitivity to bad smell gas and alcoholic gas, in which the humidity is sensed and measured by variations in electrical resistance of the apatite ceramic base plate and the bad smell gas such as hydrogen sulfide, methyl mercaptan, etc. is sensed and measured by variations in electrical resistance of the metal oxide.
摘要翻译: 一种由磷灰石陶瓷基板制成的单一整体结构的气体和湿度感测元件,其上提供了特殊的金属氧化物如氧化锡,氧化锌或钛和铌的复合氧化物。 传感元件具有检测气体和湿度的功能,对恶劣气味和酒精气体具有出色的敏感性,其中通过磷灰石陶瓷基板和恶劣气体如硫化氢的电阻变化来检测和测量湿度 ,甲基硫醇等通过金属氧化物的电阻的变化来检测和测量。
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公开(公告)号:US5130270A
公开(公告)日:1992-07-14
申请号:US567109
申请日:1990-08-14
IPC分类号: C30B19/10 , C30B19/04 , C30B19/06 , H01L21/208 , H01L21/368
CPC分类号: H01L21/02625 , C30B19/04 , C30B19/063 , C30B29/48 , H01L21/02411 , H01L21/0248 , H01L21/02562 , Y10S148/101
摘要: A hetero-epitaxial liquid phase growth method for growing a compound semiconductor by liquid phase epitaxy includes placing a melt in a closed melt boat on a substrate and epitaxially growing a first thin film, opening the melt boat while the melt remains in a melted state for a predetermined time to evaporate a component of the melt, and epitaxially growing a second thin film on the first thin film from the melt from which the component has been evaporated.
摘要翻译: 用于通过液相外延生长化合物半导体的异质外延液相生长方法包括将熔体在封闭的熔体舟中放置在衬底上并外延生长第一薄膜,在熔体保持熔融状态时打开熔体舟, 预定时间来蒸发熔体的组分,并且从部件蒸发的熔体在第一薄膜上外延生长第二薄膜。
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公开(公告)号:US4419889A
公开(公告)日:1983-12-13
申请号:US248374
申请日:1981-03-27
申请人: Katsutoshi Muto , Takao Sawada , Yoshiharu Komine
发明人: Katsutoshi Muto , Takao Sawada , Yoshiharu Komine
CPC分类号: H05B6/6458 , G01N27/121
摘要: A moisture sensitive device is disclosed which comprises a moisture sensitive element including a material comprising a hydroxyapatite, i.e. M.sub.10 (PO.sub.4).sub.6 (OH).sub.2, wherein M is at least one member selected from the group consisting of Sr, Ca and Ba, at least two electrodes formed on the moisture sensitive element, with the electrodes being separated by the element, and electrical leads connected to each of the electrodes.
摘要翻译: 公开了一种湿度敏感装置,其包括湿敏元件,其包括含有羟基磷灰石的材料,即M10(PO4)6(OH)2,其中M是选自Sr,Ca和Ba中的至少一种,在 形成在湿敏元件上的至少两个电极,其中电极被元件分离,电引线连接到每个电极。
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