Wire bonding apparatus and method using the same
    2.
    发明授权
    Wire bonding apparatus and method using the same 有权
    引线接合装置及其使用方法

    公开(公告)号:US08245902B2

    公开(公告)日:2012-08-21

    申请号:US13237345

    申请日:2011-09-20

    IPC分类号: B23K37/00

    摘要: Provided are a wire bonding apparatus and a method wire bonding and manufacturing a semiconductor device using the same. The wire bonding apparatus includes a heater block configured to support a stack including a chip mounting frame and a plurality of chips stacked on the chip mounting frame. The heater block is configured to supply heat to a first portion of the stack. The apparatus further includes a chip heating unit disposed at a different height from the heater block. The chip heating unit is configured to supply heat to a second portion of the stack at a different height from the first portion. The apparatus further includes a first temperature sensing unit positioned to be located at a first height and to determine a first temperature at the first portion of the stack, a second temperature sensing unit positioned to be located at a second height and to determine a second temperature at the second portion of the stack, and a temperature adjusting unit configured to compare the first temperature to the second temperature and to adjust the magnitude of the heat supplied by at least one of the heater block and the chip heating unit according to a result of the comparison.

    摘要翻译: 提供一种引线接合装置和使用其的半导体器件的引线接合和制造方法。 引线接合装置包括:加热块,其构造成支撑包括芯片安装框架和堆叠在芯片安装框架上的多个芯片的堆叠。 加热器块被配置为向堆叠的第一部分供应热量。 该装置还包括设置在与加热器块不同高度的芯片加热单元。 芯片加热单元被配置为以与第一部分不同的高度向堆叠的第二部分供热。 该装置还包括第一温度感测单元,其定位成位于第一高度处并且确定堆叠的第一部分处的第一温度;第二温度感测单元,定位成位于第二高度处,并且确定第二温度 在所述堆叠的第二部分处,以及温度调节单元,其被配置为将所述第一温度与所述第二温度进行比较,并且根据所述加热器块和所述芯片加热单元中的至少一个提供的热量的大小根据 比较。

    WIRE BONDING APPARATUS AND METHOD USING THE SAME
    4.
    发明申请
    WIRE BONDING APPARATUS AND METHOD USING THE SAME 有权
    电线连接装置及其使用方法

    公开(公告)号:US20120111923A1

    公开(公告)日:2012-05-10

    申请号:US13237345

    申请日:2011-09-20

    IPC分类号: B23K37/00

    摘要: Provided are a wire bonding apparatus and a method wire bonding and manufacturing a semiconductor device using the same. The wire bonding apparatus includes a heater block configured to support a stack including a chip mounting frame and a plurality of chips stacked on the chip mounting frame. The heater block is configured to supply heat to a first portion of the stack. The apparatus further includes a chip heating unit disposed at a different height from the heater block. The chip heating unit is configured to supply heat to a second portion of the stack at a different height from the first portion. The apparatus further includes a first temperature sensing unit positioned to be located at a first height and to determine a first temperature at the first portion of the stack, a second temperature sensing unit positioned to be located at a second height and to determine a second temperature at the second portion of the stack, and a temperature adjusting unit configured to compare the first temperature to the second temperature and to adjust the magnitude of the heat supplied by at least one of the heater block and the chip heating unit according to a result of the comparison.

    摘要翻译: 提供一种引线接合装置和使用其的半导体器件的引线接合和制造方法。 引线接合装置包括:加热块,其构造成支撑包括芯片安装框架和堆叠在芯片安装框架上的多个芯片的堆叠。 加热器块被配置为向堆叠的第一部分供应热量。 该装置还包括设置在与加热器块不同高度的芯片加热单元。 芯片加热单元被配置为以与第一部分不同的高度向堆叠的第二部分供热。 该装置还包括第一温度感测单元,其定位成位于第一高度处并且确定堆叠的第一部分处的第一温度;第二温度感测单元,定位成位于第二高度处,并且确定第二温度 在所述堆叠的第二部分处,以及温度调节单元,其被配置为将所述第一温度与所述第二温度进行比较,并且根据所述加热器块和所述芯片加热单元中的至少一个提供的热量的大小根据 比较。