公开(公告)号：US08704431B2

公开(公告)日：2014-04-22

申请号：US13462454

申请日：2012-05-02

Applicant: Hiroshi Shirasu ,  Yasuo Aoki ,  Motoo Koyama ,  Takayuki Kikuchi

Inventor： Hiroshi Shirasu ,  Yasuo Aoki ,  Motoo Koyama ,  Takayuki Kikuchi

IPC: H01J61/52

CPC classification number: F21V19/006 ,  G03F7/70016 ,  H01J5/56 ,  H01J61/523 ,  H01J61/822

Abstract: A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.

Abstract translation: 光源装置配备有放电灯，其具有形成发光部的玻璃管和与其连接的基座部件，以及通过基座部件保持放电灯的安装装置。 其特征在于，所述基座部件具有与所述安装装置的定位板接触的凸缘部以及将所述凸缘部压向所述定位板的按压力而被推压的固定部。 此外，安装装置具有通过压缩螺旋弹簧推压固定部的固定臂。

公开(公告)号：US08395758B2

公开(公告)日：2013-03-12

申请号：US12781110

申请日：2010-05-17

Applicant: Yasuo Aoki

Inventor： Yasuo Aoki

IPC: B64C17/06 ,  G03B27/32 ,  G03B27/42 ,  G03B27/58 ,  G03B27/62

CPC classification number: G03F7/709

Abstract: While one ends of ropes are respectively tied to a −Y side leg section and a +Y side leg section of a frame caster, the other ends of the ropes hang down in a −Z direction via a plurality of pulleys fixed to the upper sections of frames that are each separated from an apparatus main body, and a weight having a weight corresponding to a half the weight to be reduced is tied to each of the other ends. In this case, even if the apparatus main body oscillates in vertical or lateral directions (normal directions of the pulleys) owing to the action of a vibration isolation table, the position of the weight only vertically moves by rotation of the pulleys, and the reduced amount of the apparatus weight does not vary. Further, since any coil springs are not used, sympathetic vibration with the apparatus main body and the vibration isolation table does not occur, which allows the attenuation characteristics of the vibration isolation table to be improved. Therefore, the exposure apparatus can be increased in size without inducing the cost rise.

Abstract translation: 绳索的一端分别与框架脚轮的-Y侧腿部分和+ Y侧腿部分连接，绳索的另一端通过固定到上部的多个滑轮沿-Z方向下垂 各自与装置主体分离的框架，并且具有对应于要减小的重量的一半的重量的重量被连接到每个的另一端。 在这种情况下，即使装置主体由于振动隔离台的作用而在垂直或横向（滑轮的法线方向）上摆动，所以重量的位置仅通过滑轮的旋转而垂直移动，并且减小 设备重量的数量不变。 此外，由于不使用任何螺旋弹簧，不会发生与装置主体和隔振台的交感振动，这允许提高隔振台的衰减特性。 因此，曝光装置的尺寸可以增加，而不会导致成本上升。

公开(公告)号：US20120248960A1

公开(公告)日：2012-10-04

申请号：US13462454

申请日：2012-05-02

Applicant: Hiroshi SHIRASU ,  Yasuo Aoki ,  Motoo Koyama ,  Takayuki Kikuchi

Inventor： Hiroshi SHIRASU ,  Yasuo Aoki ,  Motoo Koyama ,  Takayuki Kikuchi

IPC: H01J61/52

CPC classification number: F21V19/006 ,  G03F7/70016 ,  H01J5/56 ,  H01J61/523 ,  H01J61/822

Abstract: A light source apparatus is equipped with a discharge lamp, which has a glass tube that forms a light emitting part and a base member that is coupled thereto, and a mounting apparatus that holds the discharge lamp via the base member. Therein, the base member has a flange part that contacts positioning plate of the mounting apparatus, and a fixed part that is urged with a pressing force that presses the flange part to the positioning plate. Furthermore, the mounting apparatus has a fixing arm that urges the fixed part by a compression coil spring.

Abstract translation: 光源装置配备有放电灯，其具有形成发光部的玻璃管和与其连接的基座部件，以及通过基座部件保持放电灯的安装装置。 其特征在于，所述基座部件具有与所述安装装置的定位板接触的凸缘部以及将所述凸缘部压向所述定位板的按压力而被推压的固定部。 此外，安装装置具有通过压缩螺旋弹簧推压固定部的固定臂。

公开(公告)号：US20110053092A1

公开(公告)日：2011-03-03

申请号：US12859484

申请日：2010-08-19

Applicant: Yasuo AOKI

Inventor： Yasuo AOKI

IPC: G03B27/58 ,  G03F7/20 ,  B23Q16/00 ,  B25B11/00

CPC classification number: G03F7/70716 ,  B65G49/065 ,  G03F7/70791 ,  H01L21/67784 ,  H01L21/6838

Abstract: A plurality of air levitation units that jet air to the lower surface of a substrate are placed below the substrate, and the substrate is supported in a noncontact manner so as to be substantially horizontal. Further, a portion subject to exposure of the substrate is held from below in a noncontact manner by a chuck main body that a fixed-point stage has, and a surface position of the portion subject to exposure is adjusted in a pinpoint manner. Consequently, exposure can be performed on the substrate with high precision. Since the chuck main body moves in a scanning direction according to the position of the substrate, the chuck main body can surely hold the substrate even when the substrate proceeds into an exposure area.

Abstract translation: 将空气喷射到基板的下表面的多个空气悬浮单元放置在基板的下方，并且以非接触的方式支撑基板以使其基本上水平。 此外，由基板曝光的部分由定位台具有的卡盘主体以非接触的方式从下方保持，并且以精确的方式调整受到曝光的部分的表面位置。 因此，可以高精度地对基板进行曝光。 由于卡盘主体根据基板的位​​置沿扫描方向移动，所以即使当基板进入曝光区域时，卡盘主体也能够可靠地保持基板。

公开(公告)号：US20110043784A1

公开(公告)日：2011-02-24

申请号：US12855181

申请日：2010-08-12

Applicant: Yasuo AOKI ,  Tomohide Hamada ,  Hiroshi Shirasu ,  Manabu Toguchi

Inventor： Yasuo AOKI ,  Tomohide Hamada ,  Hiroshi Shirasu ,  Manabu Toguchi

IPC: G03B27/58 ,  B65G47/00 ,  B65G43/00

CPC classification number: G03F7/707 ,  B65G49/065 ,  G03F1/82 ,  G03F7/70791 ,  G03F7/70816 ,  H01L21/67784 ,  H01L21/68 ,  H01L21/6838

Abstract: A substrate is held by adsorption by a substrate holding frame that is formed into a frame shape and is lightweight, and the substrate holding frame is driven along a horizontal plane by a drive unit that includes a linear motor. Below the substrate holding frame, a plurality of air levitation units are placed that support by levitation the substrate in a noncontact manner such that the substrate is substantially horizontal, by jetting air to the lower surface of the substrate. Since the plurality of air levitation units cover a movement range of the substrate holding frame, the drive unit can guide the substrate holding frame (substrate) along the horizontal plane at high speed and with high precision.

Abstract translation: 基板通过被形成为框架形状的基板保持框架的吸附保持并且重量轻，并且基板保持框架通过包括线性马达的驱动单元沿着水平面驱动。 在基板保持框架下方，放置多个空气悬浮单元，其通过以非接触方式悬浮基板来支撑，使得基板基本上水平，通过将空气喷射到基板的下表面。 由于多个空气悬浮单元覆盖基板保持框架的移动范围，所以驱动单元可以高速且高精度地沿着水平面引导基板保持框架（基板）。

公开(公告)号：US20100304307A1

公开(公告)日：2010-12-02

申请号：US12781110

申请日：2010-05-17

Applicant: Yasuo AOKI

Inventor： Yasuo AOKI

IPC: G03F7/20 ,  G03B27/58

CPC classification number: G03F7/709

Abstract: While one ends of ropes are respectively tied to a −Y side leg section and a +Y side leg section of a frame caster, the other ends of the ropes hang down in a −Z direction via a plurality of pulleys fixed to the upper sections of frames that are each separated from an apparatus main body, and a weight having a weight corresponding to a half the weight to be reduced is tied to each of the other ends. In this case, even if the apparatus main body oscillates in vertical or lateral directions (normal directions of the pulleys) owing to the action of a vibration isolation table, the position of the weight only vertically moves by rotation of the pulleys, and the reduced amount of the apparatus weight does not vary. Further, since any coil springs are not used, sympathetic vibration with the apparatus main body and the vibration isolation table does not occur, which allows the attenuation characteristics of the vibration isolation table to be improved. Therefore, the exposure apparatus can be increased in size without inducing the cost rise.

Abstract translation: 绳索的一端分别与框架脚轮的-Y侧腿部分和+ Y侧腿部分连接，绳索的另一端通过固定到上部的多个滑轮沿-Z方向下垂 各自与装置主体分离的框架，并且具有对应于要减小的重量的一半的重量的重物被连接到每个的另一端。 在这种情况下，即使装置主体由于振动隔离台的作用而在垂直或横向（滑轮的法线方向）上摆动，所以重量的位置仅通过滑轮的旋转而垂直移动，并且减小 设备重量的数量不变。 此外，由于不使用任何螺旋弹簧，不会发生与装置主体和隔振台的交感振动，这允许提高隔振台的衰减特性。 因此，曝光装置的尺寸可以增加，而不会导致成本上升。

公开(公告)号：US20100227277A1

公开(公告)日：2010-09-09

申请号：US12714733

申请日：2010-03-01

Applicant: Yasuo AOKI

Inventor： Yasuo AOKI

IPC: G03F7/20 ,  G03B27/58 ,  B23Q1/25

CPC classification number: G03F7/70716 ,  G03F7/70758 ,  G03F7/70791

Abstract: In a liquid crystal exposure apparatus, base pads are respectively placed on two surface plates, and one step board is supported by the base pads. A device main body of an empty-weight cancelling device moves from above one of the surface plates to above the other by moving on the step board, and therefore, a boundary section between the two adjacent surface plates that are separately placed does not function as a guide surface used when the empty-weight cancelling device moves. Accordingly, a fine movement stage that holds a substrate can be guided along an XY plane with high accuracy although the two surface plates are placed apart.

Abstract translation: 在液晶曝光装置中，基板分别放置在两个表面板上，一个基板由基板支撑。 空重物抵消装置的装置主体通过在踏板上移动而从一个表面板上方移动到另一个之上，因此分开放置的两个相邻表面板之间的边界部分不起作用 当空重量消除装置移动时使用的引导表面。 因此，尽管两个表面板分开，但是可以高精度地沿着XY平面引导保持基板的精细移动台。

公开(公告)号：US20080266539A1

公开(公告)日：2008-10-30

申请号：US12213730

申请日：2008-06-24

Applicant: Kei Nara ,  Seiji Miyazaki ,  Yasuo Aoki

Inventor： Kei Nara ,  Seiji Miyazaki ,  Yasuo Aoki

IPC: G03B27/42 ,  G03B27/58

CPC classification number: G03F7/70991 ,  G03F7/70525

Abstract: A device production system includes a substrate transport section which transports a substrate; a plurality of exposure sections each of which is capable of exposing the substrate; and a controller which cooperatively controls the substrate transport section and the plurality of exposure sections so that operation states of the plurality of exposure sections are in desired states. Accordingly, it is possible to improve the efficiency both in using the substrate and in the device production.

Abstract translation: 一种装置生产系统，包括：基板输送部，其输送基板; 多个曝光部，其能够使基板曝光; 以及控制器，其协作地控制所述基板输送部和所述多个曝光部，使得所述多个曝光部的操作状态处于期望状态。 因此，可以提高使用基板和装置制造中的效率。

公开(公告)号：US06670391B2

公开(公告)日：2003-12-30

申请号：US10178238

申请日：2002-06-25

Applicant: Hidetsugu Takagaki ,  Shingo Tanabe ,  Nobuyuki Kimura ,  Yasuo Aoki

Inventor： Hidetsugu Takagaki ,  Shingo Tanabe ,  Nobuyuki Kimura ,  Yasuo Aoki

IPC: A61K3135

CPC classification number: A61K31/37 ,  C07D311/56

Abstract: The present invention provides a compound which is highly safe in terms of toxicity and has a stronger antiallergic action, and particularly has an action of inhibiting both immediate and delayed type allergic reactions. A benzopyran derivative represented by the general formula (I): wherein R1 is an alkyl group having 1-10 carbon atoms or an alkenyl group having 2-10 carbon atoms, and one of R2, R3, R4, and R5 is an alkoxy group substituted with a hydroxy group or an alkoxy group substituted with a carboxy group, and the others are hydrogen atoms or physiologically acceptable salts thereof are superior as the active ingredient of an antiallergic agent.

Abstract translation: 本发明提供了一种在毒性方面高度安全并且具有更强的抗过敏作用的化合物，特别是具有抑制立即和延迟型过敏反应的作用。 由通式（I）表示的苯并吡喃衍生物：其中R 1是具有1-10个碳原子的烷基或具有2-10个碳原子的烯基，R 2，R 3， R 4，R 5为被羟基或被羧基取代的烷氧基取代的烷氧基，其余为氢原子或其生理学上可接受的盐作为抗过敏剂的活性成分优异 。

公开(公告)号：US09366974B2

公开(公告)日：2016-06-14

申请号：US12553549

申请日：2009-09-03

Applicant: Yasuo Aoki ,  Hiroshi Shirasu ,  Yoshihiko Kudo

Inventor： Yasuo Aoki ,  Hiroshi Shirasu ,  Yoshihiko Kudo

IPC: G03B27/58 ,  G03F7/20 ,  H01L21/68

CPC classification number: G03F7/70758 ,  G03F7/70716 ,  G03F7/70791 ,  H01L21/682

Abstract: A substrate stage and an empty-weight canceling mechanism that supports an empty weight of the substrate stage are made up of separate bodies. Accordingly, the size and weight of the substrate stage (a structure including the substrate stage) can be reduced, compared with the case where the substrate stage and the empty-weight canceling mechanism are integrally configured. Further, due to movement of an X coarse movement stage and a Y coarse movement stage by an X drive mechanism and a Y drive mechanism, the substrate stage is driven in an XY plane and also the empty-weight canceling mechanism that supports the empty weight of the substrate stage is driven. With this operation, the substrate stage can be driven without difficulty even when the substrate stage and the empty-weight canceling mechanism are configured of separate bodies.

Abstract translation: 支撑衬底台的空重量的衬底台和空重量消除机构由分离的主体构成。 因此，与基板台和空重重量抵消机构一体构成的情况相比，能够减小基板台（包括基板载台的结构）的尺寸和重量。 此外，由于通过X驱动机构和Y驱动机构的X粗移动台和Y粗移动台的移动，基板台在XY平面中被驱动，并且还支撑空重量的空重量抵消机构 的衬底台被驱动。 通过该操作，即使基板台和空重量抵消机构由分离的主体构成，也能够无困难地驱动基板台。