Abstract:
An inspection apparatus for inspecting electric characteristics of a plurality of devices formed on a target object includes a vertical drive mechanism for lifting and lowering a movable mounting table and a control unit for controlling the vertical drive mechanism. The vertical drive mechanism includes an elevation shaft connected to the mounting table and a servo motor for driving the elevation shaft to lift and lower the mounting table. Further, the control unit has a servo driver which includes a position control part for controlling a position of the servo motor, a torque control part for controlling a torque of the servo motor as a probe card is expanded or contracted by a change in temperature and a switching part for switching the position control part and the torque control part.
Abstract:
A test device includes a movable mounting table having a temperature controlling mechanism therein; a probe card provided with a plurality of probes positioned above the mounting table; and a first temperature control unit for controlling the temperature controlling mechanism so that a target object on the mounting table can be heated to a predetermined temperature to test electrical characteristics of the target object. The mounting table is provided with a heater facing a plurality of probes protruding from the mounting table in the high-temperature test on the target object.
Abstract:
An inspection apparatus for inspecting electric characteristics of a plurality of devices formed on a target object includes a vertical drive mechanism for lifting and lowering a movable mounting table and a control unit for controlling the vertical drive mechanism. The vertical drive mechanism includes an elevation shaft connected to the mounting table and a servo motor for driving the elevation shaft to lift and lower the mounting table. Further, the control unit has a servo driver which includes a position control part for controlling a position of the servo motor, a torque control part for controlling a torque of the servo motor as a probe card is expanded or contracted by a change in temperature and a switching part for switching the position control part and the torque control part.
Abstract:
The present invention discloses a process which comprises selectively hydrolyzing one enantiomer of racemic mixtures of an N-substituted β-amino acid alkyl ester or N-substituted 2-homopipecolic acid ester represented by the formula (I): wherein Ar, R1, R2, R3, R4 and R5 are the same as defined in the specification, in the presence of a hydrolase to form an optically active ((R) or (S))—N-substituted β-amino acid or optically active ((R) or (S))—N-substituted 2-homopipecolic acid represented by the formula (II): and simultaneously to obtain an unreacted optically active ((S) or (R))—N-substituted β-amino acid alkyl ester or unreacted optically active ((S) or (R))—N-substituted 2-homopipecolic acid ester represented by the formula (III): which has a reverse steric absolute configuration to that of the compound represented by the formula (II).
Abstract:
An inspection apparatus includes a mounting table movable in X and Y directions and an alignment mechanism which performs an alignment of a target object placed on the mounting table. Further, the alignment mechanism includes an image pickup device which is movable in either one of the X and Y directions and is capable of being stopped at a desired position and a controller for performing a preliminary alignment of the target object by moving the image pickup device and the mounting table in respectively movable directions.
Abstract:
The present invention is to provide a 3-substituted oxyglutaric acid diester compound represented by the following formula (I): wherein R1 may be the same or different from each other, and represents a substituted or unsubstituted alkyl group, R2 represents a substituted or unsubstituted alkyl group, a substituted or unsubstituted alkenyl group, a substituted or unsubstituted aralkyl group or a substituted or unsubstituted aryl group, and an optically active 3-substituted oxyglutaric acid monoester compound represented by the following formula (IV): wherein R1 and R2 have the same meanings as defined above, and processes for preparing the same.
Abstract:
A 2-silyloxy-4,5,6,7-tetrahydrothieno�3,2-c!pyridine represented by the formula (I): ##STR1## wherein R.sup.1, R.sup.2 and R.sup.3 each independently represent an alkyl group having 1 to 10 carbon atoms or an aryl group,and a salt thereof and a process for preparing the same, and a 5-alkyl-2-silyloxy-4,5,6,7-tetrahydrothieno�3,2-c!-pyridine represented by the formula (IV): ##STR2## wherein R.sup.1, R.sup.2 and R.sup.3 represent the same meanings as described above; R.sup.4 represents a hydrogen atom, an alkoxycarbonyl group having 2 to 10 carbon atoms, an acyl group having 2 to 10 carbon atoms or a cyclo-alkylcarbonyl group having 4 to 10 carbon atoms; andR.sup.5 represents a halogen atom, an alkyl group having 1 to 4 carbon atoms or an alkoxy group having 1 to 4 carbon atoms,which is useful as a synthetic intermediate of an antiplatelet medicine and an elastase inhibitor, etc., and a process for preparing the same.
Abstract:
A probe apparatus includes a plurality of prober chamber arranged in a straight line; and a loader chamber having a substrate transfer mechanism that takes out a test target substrate from a container provided in an upper area of the prober chamber, lowers the test target substrate to a height corresponding to a loading/unloading port of the prober chamber, moves in front of a row of the prober chambers in parallel to the row of the prober chambers and transfers the test target substrate into the prober chamber. A reading mechanism for reading information recorded on the test target substrate held on the substrate transfer mechanism is installed at a horizontal moving mechanism that moves the substrate transfer mechanism in front of the row of the prober chambers in parallel to the row of the prober chambers.
Abstract:
This is to provide a process for preparing a polycarbonate diol diacrylate from a polycarbonate diol and a vinyl acrylate compound without using a protonic acid or a metal component.This is a process for preparing a polycarbonate diol diacrylate which comprises reacting a polycarbonate diol represented by the formula (I) and a vinyl acrylate compound represented by the formula (II) in the presence of a hydrolase, and a polycarbonate diol diacrylate represented by the formula (III) having a terminal acrylated ratio of 97% or more.
Abstract:
There is provided a process for preparing a carbamate compound, which is easy and commercially advantageous in that a carbamate compound can be produced with high yield from an amine compound and a carbonate compound. A process for preparing a carbamate compound which comprises the step of reacting an amine compound which has at least one amino group per molecule wherein the amine compound is selected from the group consisting of an aliphatic amine which may be substituted by an alicyclic group or an aromatic group or which may be interrupted by an alicyclic group or an aromatic group, and an alicyclic amine which may be substituted by an aliphatic group, with a carbonate compound in the presence of at least one organic solvent selected from the group consisting of a saturated cyclic hydrocarbon, an unsaturated cyclic hydrocarbon, and a non-cyclic ether by using a hydrolase.