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    OPTICAL AUTO FOCUSING SYSTEM AND METHOD FOR ELECTRON BEAM INSPECTION TOOL
    2.
    发明申请
    OPTICAL AUTO FOCUSING SYSTEM AND METHOD FOR ELECTRON BEAM INSPECTION TOOL 有权
    光电自动聚焦系统和电子束检测工具的方法

    公开(公告)号：US20080302974A1

    公开(公告)日：2008-12-11

    申请号：US11759138

    申请日：2007-06-06

    申请人： Yi Xiang Wang ,  Van-Duc Nguyen ,  Jian Zhang

    发明人： Yi Xiang Wang ,  Van-Duc Nguyen ,  Jian Zhang

    IPC分类号： G21K5/10 ,  G01B11/00

    CPC分类号： G03B13/36 ,  G02B7/32 ,  G06T7/001 ,  G06T2207/30148 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/216 ,  H01J2237/221 ,  H01J2237/2482 ,  H01J2237/2817

    摘要： A method and system for inspecting a semiconductor wafer. The method includes providing an illumination flux through a pattern plate and a lens to a surface of a specimen to project a pattern onto the surface of the specimen. The pattern is associated with the pattern plate. Additionally, the method includes detecting the illumination flux reflected from the surface of the specimen with a detector, processing information associated with the detected illumination flux, and generating a first image based on at least information associated with the detected illumination flux. The first image includes a first image part for the pattern and a second image part for the specimen. Moreover, the method includes adjusting the lens to a state in order to achieve a first predetermined quality for the first image part, and moving the specimen to a first position.

    摘要翻译： 一种用于检查半导体晶片的方法和系统。 该方法包括将图案板和透镜的照射通量提供到样品的表面以将图案投影到样品的表面上。 图案与图案板相关联。 此外，该方法包括利用检测器检测从样本表面反射的照射通量，处理与检测到的照射通量相关联的信息，以及至少基于与检测到的照射通量相关联的信息产生第一图像。 第一图像包括用于图案的第一图像部分和用于样本的第二图像部分。 此外，该方法包括将透镜调整到状态以便实现第一图像部分的第一预定质量，并将样本移动到第一位置。

    Non-contact measurement method and apparatus
    3.
    发明授权
    Non-contact measurement method and apparatus 失效
    非接触测量方法和装置

    公开(公告)号：US07327857B2

    公开(公告)日：2008-02-05

    申请号：US10797329

    申请日：2004-03-09

    申请人： Thomas Watkins Lloyd, Jr. ,  Joseph Benjamin Ross ,  Glen William Brooksby ,  Van-Duc Nguyen ,  John Lewis Schneiter ,  Steven Jeffrey Gordon ,  Faycal Benayad-Cherif ,  Victor Nzomigni ,  Donald Hamilton

    发明人： Thomas Watkins Lloyd, Jr. ,  Joseph Benjamin Ross ,  Glen William Brooksby ,  Van-Duc Nguyen ,  John Lewis Schneiter ,  Steven Jeffrey Gordon ,  Faycal Benayad-Cherif ,  Victor Nzomigni ,  Donald Hamilton

    IPC分类号： G06K9/00

    CPC分类号： F01D5/141 ,  F01D21/003 ,  G01B11/2522 ,  Y02T50/673

    摘要： A non-contact imaging apparatus for examining an object having complex surfaces or shape deformations. The imaging apparatus includes at least one imaging device for obtaining a scanned image of the exterior surfaces of the object being examined. A predetermined reference image) of an ideal model for the object is stored in a memory. An image register is coupled to the imaging device and to the memory containing the reference image of the ideal model for the object. A transformation estimator compares the scanned image to the reference image and provides a transform which maps the scanned image to the reference image and provides a set of registered object data points. One or more filter modules process the registered object data points with a priori information to reduce noise and to further enhance the accuracy and precision of the registration. A gauge estimator is coupled to the filter module. The gauge estimator utilizes the processed and registered object data to determine deformation parameters of the object, which are then displayed to an operator as gauging information.

    摘要翻译： 一种用于检查具有复杂表面或形状变形的物体的非接触式成像装置。 成像装置包括至少一个成像装置，用于获得被检查物体的外表面的扫描图像。 用于对象的理想模型的预定参考图像被存储在存储器中。 图像寄存器耦合到成像装置和包含用于对象的理想模型的参考图像的存储器。 变换估计器将扫描图像与参考图像进行比较，并提供将扫描图像映射到参考图像并提供一组注册对象数据点的变换。 一个或多个过滤器模块利用先验信息处理注册对象数据点以减少噪声并进一步提高注册的准确性和精度。 量规估计器耦合到滤波器模块。 量规估计器利用经处理和注册的对象数据来确定对象的变形参数，然后将其显示给操作者作为测量信息。

    Image interpretation method and apparatus using faces for constraint satisfaction
    4.
    发明授权
    Image interpretation method and apparatus using faces for constraint satisfaction 失效
    使用面部约束满足的图像解释方法和装置

    公开(公告)号：US4888711A

    公开(公告)日：1989-12-19

    申请号：US121301

    申请日：1987-11-16

    申请人： Van-Duc Nguyen

    发明人： Van-Duc Nguyen

    IPC分类号： G06K9/68 ,  G06T17/10

    CPC分类号： G06K9/469 ,  G06T17/10

    摘要： A method, for practice on a computer, for interpreting two-dimensional images of three-dimensional scenes is disclosed. Descriptive labels are assigned to the vertex, edge and face elements of the image. A process of constraint satisfaction and propagation is carried out between image elements that are linked together with the effect of pruning away locally inconsistent labels at each element. The remaining labels assigned to the image elements are both locally and globally consistent.

    摘要翻译： 公开了一种用于在计算机上练习用于解释三维场景的二维图像的方法。 描述性标签被分配给图像的顶点，边和面元素。 在链接在一起的图像元素之间进行约束满足和传播的过程，并且在每个元素处删除局部不一致的标签的效果。 分配给图像元素的剩余标签在本地和全局一致。

    Non-contact measurement method and apparatus
    5.
    发明申请
    Non-contact measurement method and apparatus 失效
    非接触测量方法和装置

    公开(公告)号：US20050201611A1

    公开(公告)日：2005-09-15

    申请号：US10797329

    申请日：2004-03-09

    申请人： Thomas Watkins Lloyd ,  Joseph Benjamin Ross ,  Glen William Brooksby ,  Van-Duc Nguyen ,  John Lewis Schneiter ,  Steven Jeffrey Gordon ,  Faycal Benayad-Cherif ,  Victor Nzomigni ,  Donald Hamilton

    发明人： Thomas Watkins Lloyd ,  Joseph Benjamin Ross ,  Glen William Brooksby ,  Van-Duc Nguyen ,  John Lewis Schneiter ,  Steven Jeffrey Gordon ,  Faycal Benayad-Cherif ,  Victor Nzomigni ,  Donald Hamilton

    IPC分类号： G01B11/00 ,  F01D5/14 ,  F01D21/00 ,  G01B11/24 ,  G01B11/25 ,  G06T1/00 ,  G06T5/00 ,  G06K9/00

    CPC分类号： F01D5/141 ,  F01D21/003 ,  G01B11/2522 ,  Y02T50/673

    摘要： A non-contact imaging apparatus for examining an object having complex surfaces or shape deformations. The imaging apparatus includes at least one imaging device for obtaining a scanned image of the exterior surfaces of the object being examined. A predetermined reference image) of an ideal model for the object is stored in a memory. An image register is coupled to the imaging device and to the memory containing the reference image of the ideal model for the object. A transformation estimator compares the scanned image to the reference image and provides a transform which maps the scanned image to the reference image and provides a set of registered object data points. One or more filter modules process the registered object data points with a priori information to reduce noise and to further enhance the accuracy and precision of the registration. A gauge estimator is coupled to the filter module. The gauge estimator utilizes the processed and registered object data to determine deformation parameters of the object, which are then displayed to an operator as gauging information.

    摘要翻译： 一种用于检查具有复杂表面或形状变形的物体的非接触式成像装置。 成像装置包括至少一个成像装置，用于获得被检查物体的外表面的扫描图像。 用于对象的理想模型的预定参考图像被存储在存储器中。 图像寄存器耦合到成像装置和包含用于对象的理想模型的参考图像的存储器。 变换估计器将扫描图像与参考图像进行比较，并提供将扫描图像映射到参考图像并提供一组注册对象数据点的变换。 一个或多个过滤器模块利用先验信息处理注册对象数据点以减少噪声并进一步提高注册的准确性和精度。 量规估计器耦合到滤波器模块。 量规估计器利用经处理和注册的对象数据来确定对象的变形参数，然后将其显示给操作者作为测量信息。

    Method and apparatus for calibrating a non-contact range sensor
    6.
    发明授权
    Method and apparatus for calibrating a non-contact range sensor 失效
    用于校准非接触式范围传感器的方法和装置

    公开(公告)号：US06411915B1

    公开(公告)日：2002-06-25

    申请号：US09360032

    申请日：1999-07-23

    申请人： Van-Duc Nguyen ,  Victor Nzomigni ,  Charles Vernon Stewart ,  Kishore Bubna ,  Lila Abdessemed ,  Nathalie Claire Poirier

    发明人： Van-Duc Nguyen ,  Victor Nzomigni ,  Charles Vernon Stewart ,  Kishore Bubna ,  Lila Abdessemed ,  Nathalie Claire Poirier

    IPC分类号： G06F1900

    CPC分类号： F01D21/003 ,  G06T7/35 ,  G06T7/80

    摘要： A method for calibrating a non-contact range sensor comprises the steps of employing the range sensor to obtain a range image of an object to be inspected. The range image is registered with a reference image of the object thereby providing registered data. The reference image may be derived through computer assisted drawing (CAD) data. Normal deviations between the registered data and the reference image are computed. Noise is filtered from the normal deviations. A plurality of bias vectors and a covariance matrix are estimated based on the normal deviations, stored in memory as a lookup table comprising geometric correction factors for the sensor. Images of the object subsequently obtained by the sensor are compensated in accordance with the lookup table.

    摘要翻译： 用于校准非接触式距离传感器的方法包括以下步骤：采用距离传感器来获得被检查物体的范围图像。 范围图像与对象的参考图像一起登记，从而提供注册数据。 参考图像可以通过计算机辅助绘图（CAD）数据导出。 计算注册数据和参考图像之间的正常偏差。 噪声从正常偏差过滤。 基于存储在存储器中的正常偏差来估计多个偏置向量和协方差矩阵，作为包括用于传感器的几何校正因子的查找表。 随后由传感器获得的物体的图像根据查找表进行补偿。

    Method and apparatus for image registration
    7.
    发明授权
    Method and apparatus for image registration 有权
    图像配准方法和装置

    公开(公告)号：US06690841B2

    公开(公告)日：2004-02-10

    申请号：US10085159

    申请日：2002-02-27

    申请人： Van-Duc Nguyen ,  Victor Nzomigni ,  Charles Vernon Stewart

    发明人： Van-Duc Nguyen ,  Victor Nzomigni ,  Charles Vernon Stewart

    IPC分类号： G06K932

    CPC分类号： G06T3/0043 ,  G01N21/9515 ,  G01N2021/8887 ,  G06K9/00201 ,  G06K9/6203 ,  Y10S345/953

    摘要： A machine vision system includes an apparatus for registering an input image of an object, such as an aircraft engine blade, to a reference image comprising ideal specifications for the object in order to detect flaws in the object. The system includes one or more imaging devices for obtaining the input image representing the object. The system further includes a processor for registering the input image to the reference image. The processor includes a patch determining device for identifying low curvature portions of the reference image off-line. A transformation estimator matches the low curvature portions of the reference image to corresponding low curvature portions of the object, and provides a transformation matrix which maps points on the reference image 11 to corresponding points on the input image for precise and fast registration.

    摘要翻译： 机器视觉系统包括用于将诸如飞机发动机叶片的物体的输入图像登记到包括对象的理想规格的参考图像以检测物体中的缺陷的装置。 该系统包括用于获得表示对象的输入图像的一个或多个成像装置。 该系统还包括用于将输入图像登记到参考图像的处理器。 处理器包括用于从离线识别参考图像的低曲率部分的补片确定装置。 变换估计器将参考图像的低曲率部分与对象的相应低曲率部分相匹配，并且提供将参考图像11上的点与输入图像上的对应点进行映射以进行精确和快速配准的变换矩阵。

    Method and apparatus for image registration
    8.
    发明授权
    Method and apparatus for image registration 有权

    公开(公告)号：US06504957B2

    公开(公告)日：2003-01-07

    申请号：US10085158

    申请日：2002-02-27

    申请人： Van-Duc Nguyen ,  Victor Nzomigni ,  Charles Vernon Stewart

    发明人： Van-Duc Nguyen ,  Victor Nzomigni ,  Charles Vernon Stewart

    IPC分类号： G06K962

    CPC分类号： G06T3/0043 ,  G01N21/9515 ,  G01N2021/8887 ,  G06K9/00201 ,  G06K9/6203 ,  Y10S345/953

    摘要： A machine vision system includes an apparatus for registering an input image of an object, such as an aircraft engine blade, to a reference image comprising ideal specifications for the object in order to detect flaws in the object. The system includes one or more imaging devices for obtaining the input image representing the object. The system further includes a processor for registering the input image to the reference image. The processor includes a patch determining device for identifying low curvature portions of the reference image off-line. A transformation estimator matches the low curvature portions of the reference image to corresponding low curvature portions of the object, and provides a transformation matrix which maps points on the reference image 11 to corresponding points on the input image for precise and fast registration.

    Method for automatic screening of abnormalities
    9.
    发明授权
    Method for automatic screening of abnormalities 有权
    自动筛查异常的方法

    公开(公告)号：US06336082B1

    公开(公告)日：2002-01-01

    申请号：US09263348

    申请日：1999-03-05

    申请人： Van-Duc Nguyen ,  Joseph Leagrand Mundy

    发明人： Van-Duc Nguyen ,  Joseph Leagrand Mundy

    IPC分类号： G06F100

    CPC分类号： G06K9/6255 ,  G06T7/001 ,  G06T2207/10116 ,  G06T2207/30164

    摘要： A method of detecting abnormalities including a learning phase and an inspection phase. In the learning phase, a first statistical quantity and a second statistical quantity are determined based on a first set of n-dimensional data. A second set of n-dimensional data is obtained and a bimodal distribution for a plurality of n-dimensional points in each of the second set of n-dimensional data is determined. A reference template is generated in response to the first statistical quantity, second statistical quantity and bimodal distribution. In the inspection phase, n-dimensional test data to be inspected for abnormalities is obtained and compared to the reference template to detect abnormalities.

    摘要翻译： 一种检测包括学习阶段和检查阶段的异常的方法。 在学习阶段，基于第一组n维数据确定第一统计量和第二统计量。 获得第二组n维数据，并且确定第二组n维数据中的每一个中的多个n维点的双峰分布。 响应于第一统计量，第二统计量和双峰分布生成参考模板。 在检查阶段，得到要检查异常的n维测试数据，并与参考模板进行比较以检测异常。