公开(公告)号：US08271103B2

公开(公告)日：2012-09-18

申请号：US12113613

申请日：2008-05-01

申请人： Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

发明人： Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

IPC分类号： G05B13/02 ,  G06F19/00 ,  G06F17/18 ,  G06F11/30 ,  G06F7/00

CPC分类号： G05B19/41875 ,  G05B2219/32201 ,  G05B2219/42001 ,  G05B2219/45031

摘要： A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.

摘要翻译： 描述了用于创建新模型或基于模板更新先前创建的模型的系统和计算机实现的方法。 从先前创建的模型生成模板。 先前创建的模型指定与制造过程，过程工具或室相关联的一组参数。 获取，监测和分析与制造过程相关的变量。 采用统计分析（或多变量统计分析）来分析监测变量和参数集。 当任何受监视的变量满足阈值条件时，将根据模板和监视变量创建新模型或先前创建的模型的参数进行更新，调整或修改。 还描述了便于用户和系统之间的通信以及信息显示的用户界面。

公开(公告)号：US20120303142A1

公开(公告)日：2012-11-29

申请号：US13568881

申请日：2012-08-07

申请人： Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

发明人： Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

IPC分类号： G05B13/04

CPC分类号： G05B19/41875 ,  G05B2219/32201 ,  G05B2219/42001 ,  G05B2219/45031

摘要： A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.

摘要翻译： 描述了用于创建新模型或基于模板更新先前创建的模型的系统和计算机实现的方法。 从先前创建的模型生成模板。 先前创建的模型指定与制造过程，过程工具或室相关联的一组参数。 获取，监测和分析与制造过程相关的变量。 采用统计分析（或多变量统计分析）来分析监测变量和参数集。 当任何受监视的变量满足阈值条件时，将根据模板和监视变量创建新模型或先前创建的模型的参数进行更新，调整或修改。 还描述了便于用户和系统之间的通信以及信息显示的用户界面。

公开(公告)号：US20090210086A1

公开(公告)日：2009-08-20

申请号：US12337310

申请日：2008-12-17

申请人： Uzi LevAmi ,  Svante Bjarne Wold

发明人： Uzi LevAmi ,  Svante Bjarne Wold

IPC分类号： B07C5/34

CPC分类号： G06K9/6247 ,  G06Q30/02

摘要： A system and method is provided for computerized sorting irregular objects. The method includes receiving a representative set of irregular objects comprising at least two types of user-specified qualities. The method also includes receiving at least two types of measured data for the representative set of irregular objects. The method also includes generating at least one of a PCA model or a PLS model based on at least two user-specified qualities of the irregular objects and the at least two types of measured data for the representative set of irregular objects, and sorting a second set of irregular objects based on the at least one of the PCA model or the PLS model.

摘要翻译： 提供了一种用于计算机排序不规则对象的系统和方法。 该方法包括接收包括至少两种类型的用户指定质量的代表性的不规则对象集合。 该方法还包括为代表性的不规则对象组接收至少两种类型的测量数据。 该方法还包括基于不规则对象的至少两个用户指定的质量和代表性的不规则对象集合的至少两种类型的测量数据来生成PCA模型或PLS模型中的至少一个，并且对第二 基于PCA模型或PLS模型中的至少一个的一组不规则对象。

公开(公告)号：US20090037013A1

公开(公告)日：2009-02-05

申请号：US12113613

申请日：2008-05-01

申请人： Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

发明人： Lawrence Hendler ,  Stela Diamant Lazarovich ,  Ron Hadar ,  Nouna Kettaneh ,  Uzi Levami ,  Dmitry Perlroizen

IPC分类号： G06F19/00

CPC分类号： G05B19/41875 ,  G05B2219/32201 ,  G05B2219/42001 ,  G05B2219/45031

摘要： A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.

摘要翻译： 描述了用于创建新模型或基于模板更新先前创建的模型的系统和计算机实现的方法。 从先前创建的模型生成模板。 先前创建的模型指定与制造过程，过程工具或室相关联的一组参数。 获取，监测和分析与制造过程相关的变量。 采用统计分析（或多变量统计分析）来分析监测变量和参数集。 当任何受监视的变量满足阈值条件时，将根据模板和监视变量创建新模型或先前创建的模型的参数进行更新，调整或修改。 还描述了便于用户和系统之间的通信以及信息显示的用户界面。