发明申请
- 专利标题: AUTOMATED MODEL BUILDING AND MODEL UPDATING
- 专利标题(中): 自动模型建筑和模型更新
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申请号: US13568881申请日: 2012-08-07
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公开(公告)号: US20120303142A1公开(公告)日: 2012-11-29
- 发明人: Lawrence Hendler , Stela Diamant Lazarovich , Ron Hadar , Nouna Kettaneh , Uzi Levami , Dmitry Perlroizen
- 申请人: Lawrence Hendler , Stela Diamant Lazarovich , Ron Hadar , Nouna Kettaneh , Uzi Levami , Dmitry Perlroizen
- 申请人地址: US MA Andover
- 专利权人: MKS Instruments Inc.
- 当前专利权人: MKS Instruments Inc.
- 当前专利权人地址: US MA Andover
- 主分类号: G05B13/04
- IPC分类号: G05B13/04
摘要:
A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.
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