发明申请
- 专利标题: Automated Model Building and Model Updating
- 专利标题(中): 自动化模型构建和模型更新
-
申请号: US12113613申请日: 2008-05-01
-
公开(公告)号: US20090037013A1公开(公告)日: 2009-02-05
- 发明人: Lawrence Hendler , Stela Diamant Lazarovich , Ron Hadar , Nouna Kettaneh , Uzi Levami , Dmitry Perlroizen
- 申请人: Lawrence Hendler , Stela Diamant Lazarovich , Ron Hadar , Nouna Kettaneh , Uzi Levami , Dmitry Perlroizen
- 申请人地址: US MA Andover
- 专利权人: MKS Instruments, Inc.
- 当前专利权人: MKS Instruments, Inc.
- 当前专利权人地址: US MA Andover
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
A system and computer-implemented method for creating a new model or updating a previously-created model based on a template are described. A template is generated from a previously-created model. The previously-created model specifies a set of parameters associated with a manufacturing process, a process tool or chamber. Variables associated with the manufacturing process are acquired, monitored, and analyzed. A statistical analysis (or multivariate statistical analysis) is employed to analyze the monitored variables and the set of parameters. When any of the monitored variables satisfy a threshold condition, a new model is created or the parameters of the previously-created model are updated, adjusted, or modified based on the template and the monitored variables. A user interface facilitating communication between a user and the systems and display of information is also described.
公开/授权文献
- US08271103B2 Automated model building and model updating 公开/授权日:2012-09-18
信息查询