Apparatus and method for testing a plurality of electrical components that are coupled to one another
    2.
    发明授权
    Apparatus and method for testing a plurality of electrical components that are coupled to one another 失效
    用于测试彼此耦合的多个电气部件的装置和方法

    公开(公告)号:US06831474B2

    公开(公告)日:2004-12-14

    申请号:US10203179

    申请日:2002-12-30

    IPC分类号: G01R3128

    CPC分类号: G01R31/275 G01R31/2851

    摘要: An apparatus and method for testing a plurality of electrical components that are coupled to one another. Further, an electrical selection unit, coupled to the electrical components to be tested, is provided for selecting at least one electrical component to be tested. A parasitic voltage drop in the testing circuit can be at least partially compensated using a control element coupled to the electrical components to be tested. The invention makes it possible, for testing of electrical components on a wafer over a large distance, i.e., several millimeters, to permit automated compensation of interference influences which occur as a result of the lines coupling or connecting the components to be tested.

    摘要翻译: 一种用于测试彼此耦合的多个电气部件的装置和方法。 此外,提供耦合到要测试的电气部件的电选择单元,用于选择至少一个要测试的电气部件。 可以使用耦合到要测试的电气部件的控制元件来至少部分地补偿测试电路中的寄生电压降。 本发明使得可以在大范围(即几毫米)上测试晶片上的电气部件,以允许自动补偿由于线路耦合或连接待测组件的结果而发生的干扰影响。