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公开(公告)号：US4801241A
公开(公告)日：1989-01-31
申请号：US588029
申请日：1984-03-09
IPC分类号： H01L21/677 , B23Q41/02 , B23Q41/04 , B65G49/07 , H01L21/00 , H01L21/02 , H01L21/302 , H01L21/3065 , H01L21/67 , C23C14/00
CPC分类号： H01L21/67196 , H01L21/67276 , Y10S414/139
摘要： Automated article processing, particularly semiconductor wafer processing, is accomplished in a modular article processing machine. The design of the machine allows easy reconfiguration between single and multiple processing station systems. Articles are handled according to a method which easily accommodates the various configurations of the machine and which provides efficient throughput. The machine includes a number of electromechanical and pneumatic systems under the control of at least one microprocessor. Machine state knowledge necessary for startup in the midst of operation, such as following a power interruption, is provided by a mechanical counter indexed at the completion of each stage of operation by the microprocessor controller.
摘要翻译： 自动制品处理，特别是半导体晶片处理，在模块化制品处理机中完成。 机器的设计允许单个和多个处理站系统之间的简单重新配置。 根据容易适应机器的各种配置并且提供有效吞吐量的方法来处理物品。 该机器包括在至少一个微处理器的控制下的许多机电和气动系统。 通过由微处理器控制器在每个操作阶段完成时由索引的机械计数器提供在操作中所需的机器状态知识（例如电源中断之后）。
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公开(公告)号：US4619573A
公开(公告)日：1986-10-28
申请号：US588030
申请日：1984-03-09
IPC分类号： B65G47/90 , H01L21/67 , H01L21/677 , H01L21/687 , B65G25/00
CPC分类号： H01L21/68742 , H01L21/67745 , H01L21/67748 , H01L21/67778 , H01L21/68785 , H01L21/68792
摘要： Wafer transport in the vacuum portion of an automated wafer processing machine is accomplished by means of an improved transport mechanism. The primary transport device is a rail guided, magnetically driven shuttle plate. Baffles serve to isolate the particle producing portions of the mechanism from the wafers. The major drive components are located inside the rails and outside the vacuum containment system. A pin lift apparatus located on the reactor chucks serves to remove and replace wafers on the shuttle plate. The disclosed apparatus provides efficient and reliable wafer transport with a minimum amount of particulate generation and is easily reconfigurable to single or multiple head machines.
摘要翻译： 在自动化晶片加工机的真空部分中的晶片传送通过改进的输送机构实现。 主要运输装置是导轨导向的穿梭板。 挡板用于将晶片的产生颗粒的部分与晶片隔离。 主要的驱动部件位于导轨内部和真空容纳系统的外部。 位于反应器卡盘上的销钉提升装置用于移除和更换梭板上的晶片。 所公开的装置提供了具有最少量的颗粒产生的有效且可靠的晶片输送，并且可以容易地重新配置成单头或多头机。
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公开(公告)号：US07992333B1
公开(公告)日：2011-08-09
申请号：US12541105
申请日：2009-08-13
IPC分类号： G09F21/04
摘要： A vehicle identification device includes one or more clips configured to attach the device to a vehicle door or window. The identification device optionally includes reflective material so that the vehicle is more easily seen. The identification device optionally includes identification indicia such as letters or numbers. The identification device is optionally deployed from within the vehicle, thus improving safety.
摘要翻译： 车辆识别装置包括被配置为将装置附接到车门或窗口的一个或多个夹子。 识别装置可选地包括反射材料，使得车辆更容易看到。 识别装置可选地包括诸如字母或数字的识别标记。 识别装置可选地从车内部署，从而提高安全性。
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公开(公告)号：US4547247A
公开(公告)日：1985-10-15
申请号：US588031
申请日：1984-03-09
IPC分类号： H01L21/302 , C23C14/56 , C23C16/54 , H01J37/18 , H01L21/3065 , H01L21/67 , C23F1/02 , B44C1/22 , C03C15/00
摘要： A plasma reactor of the single wafer, planar electrode type achieves improved serviceability by means of a service seal arrangement. The lower electrode of the plasma reactor is carried on a chuck. Both the chuck and the upper portions of the reactor seal to an upper plate of a vacuum containment vessel. A wafer transport mechanism is contained within the vacuum containment vessel. The sealing arrangement allows removal of the upper portions of the reactor and even replacement of the lower electrode without disturbing the vacuum in the vacuum containment vessel.
摘要翻译： 单晶片的等离子体反应器，平面电极类型通过服务密封装置实现了改进的可使用性。 等离子体反应器的下电极承载在卡盘上。 卡盘和反应堆的上部都密封到真空密封容器的上板。 晶片输送机构包含在真空容纳容器内。 密封装置允许去除反应器的上部并且甚至更换下部电极，而不会干扰真空容纳容器中的真空。
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