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172 条记录 (耗时 0.037 秒)

    Flow measuring device
    4.
    发明授权
    Flow measuring device 有权
    流量测量装置

    公开(公告)号：US08756989B2

    公开(公告)日：2014-06-24

    申请号：US13281678

    申请日：2011-10-26

    申请人： Yasushi Goka ,  Takashi Enomoto ,  Noboru Kitahara

    发明人： Yasushi Goka ,  Takashi Enomoto ,  Noboru Kitahara

    IPC分类号： G01F1/68

    CPC分类号： G01F1/6842 ,  G01F15/14

    摘要： A flow measuring device includes a housing, a support, and a flow measurement element. The housing defines a passage therein and includes a passage narrowing part, which reduces a cross-sectional area of the passage, in a predetermined part of the passage. The support has a platy shape and is disposed along a flow direction of fluid flowing in the passage. The flow measurement element is located inside the passage narrowing part and is disposed on a surface of the support. The flow measurement element detects a flow rate of fluid flowing in the passage. The passage narrowing part has an inner wall surface that gradually reduces a width of the passage from a center side to both end sides of the passage in a height direction of the passage, which is perpendicular to a direction of the width of the passage.

    摘要翻译： 流量测量装置包括壳体，支撑件和流量测量元件。 壳体在其中限定通道，并且包括在通道的预定部分中减小通道的横截面面积的通道变窄部分。 支撑体具有板状，并且沿着在通道中流动的流体的流动方向设置。 流量测量元件位于通道变窄部分的内部并且设置在支撑体的表面上。 流量测量元件检测在通道中流动的流体的流量。 通道狭窄部具有内壁面，该内壁面在与通道的宽度方向垂直的通道的高度方向上逐渐减小通道从通道的中心侧到两端侧的宽度。

    Zoom lens system
    5.
    发明授权
    Zoom lens system 有权
    变焦镜头系统

    公开(公告)号：US08605365B2

    公开(公告)日：2013-12-10

    申请号：US13391668

    申请日：2010-08-13

    申请人： Junichi Fujisaki ,  Takashi Enomoto ,  Tomoya Koga

    发明人： Junichi Fujisaki ,  Takashi Enomoto ,  Tomoya Koga

    IPC分类号： G02B15/14

    CPC分类号： G02B15/177

    摘要： The objective of the present invention is to provide a zoom lens system having an f-number of approximately 1.3 at the wide extremity, a half angle-of-view of 75 degrees, and a zoom ratio of approximately 3:1. The solution to this objective is to provide a zoom lens system including a first lens group, having a negative refractive power, a diaphragm, and a second lens group, having a positive refractive power, in that order from the object side; wherein the first lens group and the second lens group move in the optical axis direction so that the distance therebetween decreases upon zooming from the wide-angle extremity to the telephoto extremity.

    摘要翻译： 本发明的目的是提供一种变焦透镜系统，其在宽端具有约1.3的f数，75度的半视角和大约3:1的变焦比。 该目的的解决方案是从物体侧依次提供具有正折光力的具有负折光力的第一透镜组，第二透镜组和第二透镜组的变焦透镜系统; 其中所述第一透镜组和所述第二透镜组在所述光轴方向上移动，使得在从所述广角端到远摄端的变焦时，其间的距离减小。

    FLOW MEASURING DEVICE
    6.
    发明申请
    FLOW MEASURING DEVICE 有权
    流量测量装置

    公开(公告)号：US20120103086A1

    公开(公告)日：2012-05-03

    申请号：US13281678

    申请日：2011-10-26

    申请人： Yasushi GOKA ,  Takashi Enomoto ,  Noboru Kitahara

    发明人： Yasushi GOKA ,  Takashi Enomoto ,  Noboru Kitahara

    IPC分类号： G01F1/68 ,  G01F15/14

    CPC分类号： G01F1/6842 ,  G01F15/14

    摘要： A flow measuring device includes a housing, a support, and a flow measurement element. The housing defines a passage therein and includes a passage narrowing part, which reduces a cross-sectional area of the passage, in a predetermined part of the passage. The support has a platy shape and is disposed along a flow direction of fluid flowing in the passage. The flow measurement element is located inside the passage narrowing part and is disposed on a surface of the support. The flow measurement element detects a flow rate of fluid flowing in the passage. The passage narrowing part has an inner wall surface that gradually reduces a width of the passage from a center side to both end sides of the passage in a height direction of the passage, which is perpendicular to a direction of the width of the passage.

    摘要翻译： 流量测量装置包括壳体，支撑件和流量测量元件。 壳体在其中限定通道，并且包括在通道的预定部分中减小通道的横截面面积的通道变窄部分。 支撑体具有板状，并且沿着在通道中流动的流体的流动方向设置。 流量测量元件位于通道变窄部分的内部并且设置在支撑体的表面上。 流量测量元件检测在通道中流动的流体的流量。 通道狭窄部具有内壁面，该内壁面在与通道的宽度方向垂直的通道的高度方向上逐渐减小通道从通道的中心侧到两端侧的宽度。

    AIR FLOW MEASURING DEVICE
    7.
    发明申请
    AIR FLOW MEASURING DEVICE 有权
    空气流量测量装置

    公开(公告)号：US20120103084A1

    公开(公告)日：2012-05-03

    申请号：US13239778

    申请日：2011-09-22

    申请人： Takashi OOGA ,  Takashi Enomoto

    发明人： Takashi OOGA ,  Takashi Enomoto

    IPC分类号： G01F1/69 ,  G01F15/14

    CPC分类号： G01F1/6842

    摘要： An air flow measuring device includes a passage forming housing, a sensor housing, and a sensor part. An inner wall surface of the passage forming housing defines a measured passage. The passage forming housing includes a sensor attaching part. Measured air flows through the measured passage. The sensor housing is attached to the sensor attaching part. The sensor part is disposed on the sensor housing and measures a flow rate of the measured air flowing through the passage. The passage forming housing includes a guiding device for guiding the measured air, which flows along the inner wall surface of the passage forming housing on an upstream side of the sensor attaching part in a measured air flow direction, further toward a center of the passage than the inner wall surface of the passage forming housing on a downstream side of the sensor attaching part in the flow direction.

    摘要翻译： 气流测量装置包括通道形成壳体，传感器壳体和传感器部件。 通道形成壳体的内壁表面限定测量的通道。 通道形成壳体包括传感器附接部分。 测量的空气流经测量的通道。 传感器外壳安装在传感器安装部上。 传感器部分设置在传感器壳体上，并测量流过通道的测量空气的流量。 通道形成壳体包括引导装置，用于沿测量的空气流动方向沿着通道形成壳体的内壁表面沿着通道形成壳体的内壁表面流动，进一步朝向通道的中心引导测量的空气， 所述通道形成壳体的内壁表面在所述传感器安装部件的流动方向的下游侧。

    PARTICLE MONITOR SYSTEM AND SUBSTRATE PROCESSING APPARATUS
    9.
    发明申请
    PARTICLE MONITOR SYSTEM AND SUBSTRATE PROCESSING APPARATUS 有权
    颗粒监测系统和基板处理装置

    公开(公告)号：US20110216322A1

    公开(公告)日：2011-09-08

    申请号：US13111520

    申请日：2011-05-19

    申请人： Tsuyoshi MORIYA ,  Takashi ENOMOTO

    发明人： Tsuyoshi MORIYA ,  Takashi ENOMOTO

    IPC分类号： G01N21/00

    CPC分类号： G01N21/534 ,  G01N15/0205 ,  G01N21/94 ,  G01N2015/03

    摘要： A particle monitor system that can detect fine particles in a substrate processing apparatus. The substrate processing apparatus has a chamber in which a substrate is housed and subjected to processing, a dry pump that exhausts gas out of the chamber, and a bypass line that communicates the chamber and the dry pump together. The particle monitor system has a laser light oscillator that irradiates laser light toward a space in which the particles may be present, and a laser power measurement device that is disposed on an optical path of the laser light having passed through the space and measures the energy of the laser light.

    摘要翻译： 一种能够检测基板处理装置中的微粒子的粒子监视器系统。 基板处理装置具有容纳基板并经受处理的室，将气体排出室的干燥泵和将室与干燥泵连通的旁通管。 粒子监视器系统具有将激光照射到可能存在粒子的空间的激光振荡器，以及设置在穿过该空间的激光的光路上并测量能量的激光功率测量装置 的激光。

    Particle monitor system and substrate processing apparatus
    10.
    发明授权
    Particle monitor system and substrate processing apparatus 有权
    粒子监测系统和基板处理装置

    公开(公告)号：US07969572B2

    公开(公告)日：2011-06-28

    申请号：US12015156

    申请日：2008-01-16

    申请人： Tsuyoshi Moriya ,  Takashi Enomoto

    发明人： Tsuyoshi Moriya ,  Takashi Enomoto

    IPC分类号： G01N21/00

    CPC分类号： G01N21/534 ,  G01N15/0205 ,  G01N21/94 ,  G01N2015/03

    摘要： A particle monitor system that can detect fine particles in a substrate processing apparatus. The substrate processing apparatus has a chamber in which a substrate is housed and subjected to processing, a dry pump that exhausts gas out of the chamber, and a bypass line that communicates the chamber and the dry pump together. The particle monitor system has a laser light oscillator that irradiates laser light toward a space in which the particles may be present, and a laser power measurement device that is disposed on an optical path of the laser light having passed through the space and measures the energy of the laser light.

    摘要翻译： 一种能够检测基板处理装置中的微粒子的粒子监视器系统。 基板处理装置具有容纳基板并经受处理的室，将气体排出室的干燥泵和将室与干燥泵连通的旁通管。 粒子监视器系统具有将激光照射到可能存在粒子的空间的激光振荡器，以及设置在穿过该空间的激光的光路上并测量能量的激光功率测量装置 的激光。