Abstract:
A pellicle for an EUV lithography may include a pellicle film, a supporting structure and a handling block. The pellicle film may have a first surface for orienting opposite to a mask, and a second surface opposite to the first surface and for orienting toward the mask. The pellicle film may allow the EUV, which may pass through the mask, to penetrate the pellicle film. The supporting structure may be arranged on the second surface of the pellicle film to support the pellicle film. The handling block may be arranged on the first surface of the pellicle film. The handling block may have an opening configured to expose the pellicle film. Thus, the pellicle may be handled using the thick handling block, not the thin pellicle film, so that the thin pellicle film may not be damaged. The pellicle may protect the mask from byproducts generated in the EUV lithography process so that the mask may not be contaminated.
Abstract:
A reflective extreme ultraviolet mask includes a mask substrate having an exposing region and a peripheral region, the mask substrate including a light-scattering portion in the peripheral region, a reflective layer on an upper surface of the mask substrate, the reflective layer having a first opening exposing the light-scattering portion, and an absorbing layer pattern on the reflective layer, the absorbing layer pattern having a second opening in light communication with the first opening.
Abstract:
A reflective extreme ultraviolet mask includes a mask substrate having an exposing region and a peripheral region, the mask substrate including a light-scattering portion in the peripheral region, a reflective layer on an upper surface of the mask substrate, the reflective layer having a first opening exposing the light-scattering portion, and an absorbing layer pattern on the reflective layer, the absorbing layer pattern having a second opening in light communication with the first opening.
Abstract:
A light-emitting device comprises a substrate; a light-emitting layer formed on the substrate; a transparent electrode layer formed on the light-emitting layer, the transparent electrode layer having a curved surface; and a reflective layer formed on and along the curved surface of the transparent electrode layer such that the curved surface of the transparent electrode layer is transferred so as to reflect the light generated from the light-emitting layer toward the light-emitting layer.
Abstract:
A fan apparatus and an air conditioner employing such a fan apparatus are provided to reduce noise and enhance efficiency. The fan apparatus may be driven by a BLDC motor that stably drives the fan and increases an air flow rate. Heat exchange efficiency of an outdoor unit of a front suction/discharge type air conditioner may be improved by such a fan apparatus driven by such a BLDC motor.
Abstract:
A reflective extreme ultraviolet mask includes a mask substrate having an exposing region and a peripheral region, the mask substrate including a light-scattering portion in the peripheral region, a reflective layer on an upper surface of the mask substrate, the reflective layer having a first opening exposing the light-scattering portion, and an absorbing layer pattern on the reflective layer, the absorbing layer pattern having a second opening in fluid communication with the first opening.
Abstract:
The present invention discloses a front suction/discharge type outdoor unit for an air conditioner including: an outdoor unit casing being formed in a rectangular parallelepiped shape, having its one surface externally opened and its other surfaces closed, and being divided into a suction unit and a discharge unit; a compressor installed in the outdoor unit casing, for compressing a refrigerant gas supplied from an indoor unit through pipe lines; an air-cooled condenser positioned in the outdoor unit casing, for condensing the refrigerant gas from the compressor; and a sirocco cooling fan installed in the outdoor unit casing, for forming a diffuser opposite side part of a curvature unit of a housing as a plane unit, forming the fan housing to separate a diffuser opposite side member from a diffuser side member, supplying external air to the air-cooled condenser, and discharging heat exchanged air. A discharge direction of air from the sirocco cooling fan becomes more distant from the most adjacent outdoor unit.
Abstract:
A built-in type compressor/condenser unit for an air conditioner with an efficient installation structure for installing an increased capacity outdoor unit is provided. The built-in type compressor/condenser unit includes a louver frame installed on a rectangular shaped space formed on an outer wall of a building. The louver frame is divided into a suction area and a discharge area, each with a plurality of louver blades. The compressor/condenser unit casing is positioned proximate the louver frame, with the surface of the casing which faces the suction area and the discharge area of the louver frame open, and the remaining surfaces of the casing closed. A compressor, an air-cooled condenser, and a cooling fan are installed in the compressor/condenser unit casing.
Abstract:
Provided are a light emitting device including a transparent electrode having high transmittance with respect to light in a UV wavelength range as well as in a visible wavelength range and good ohmic contact characteristic with respect to a semiconductor layer and and a method of manufacturing the light emitting device. A transparent electrode of a light emitting device is formed by using a resistance change material which has high transmittance with respect to light in a UV wavelength range and of which resistance state is to be changed from a high resistance state into a low resistance state due to conducting filaments, which current can flow through, formed in the material if a voltage exceeding a threshold voltage inherent in a material applied to the material, so that it is possible to obtain high transmittance with respect to light in a UV wavelength range.
Abstract:
According to example embodiments, a reflective EUV mask may include a mask substrate, a patterned structure and a non-patterned structure on the mask substrate. At least one of the patterned structure and the non-patterned structure may include a thermally treated region configured to reduce a reflectivity of the respective patterned and non-patterned structure.