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11 条记录 (耗时 0.046 秒)

    Substrate supporting apparatus
    2.
    发明授权
    Substrate supporting apparatus 有权
    基板支撑装置

    公开(公告)号：US08087652B2

    公开(公告)日：2012-01-03

    申请号：US12188453

    申请日：2008-08-08

    申请人： Suk Min Son

    发明人： Suk Min Son

    IPC分类号： B23P19/00

    CPC分类号： H01L21/68742 ,  H01L21/68778 ,  Y10S269/903

    摘要： A substrate supporting apparatus includes first and second shafts spaced by a distance that corresponds to or exceeds a width of a substrate, and at least one wire to support the substrate. The wire has ends coupled to respective ones of the first and second shafts. The wire is raised and lowered to place a substrate onto a lower electrode in a substrate processing chamber and to remove the substrate when processing is completed.

    摘要翻译： 基板支撑装置包括间隔一定距离的第一和第二轴，该距离对应于或超过基板的宽度，以及至少一根支撑基板的线。 电线具有连接到第一和第二轴中的相应端的端部。 线被升高和降低以将衬底放置在衬底处理室中的下电极上，并且当处理完成时移除衬底。

    SUBSTRATE SUPPORTING APPARATUS
    5.
    发明申请
    SUBSTRATE SUPPORTING APPARATUS 有权
    基板支持设备

    公开(公告)号：US20090042324A1

    公开(公告)日：2009-02-12

    申请号：US12188453

    申请日：2008-08-08

    申请人： Suk Min Son

    发明人： Suk Min Son

    IPC分类号： H01L21/66

    CPC分类号： H01L21/68742 ,  H01L21/68778 ,  Y10S269/903

    摘要： A substrate supporting apparatus includes first and second shafts spaced by a distance that corresponds to or exceeds a width of a substrate, and at least one wire to support the substrate. The wire has ends coupled to respective ones of the first and second shafts. The wire is raised and lowered to place a substrate onto a lower electrode in a substrate processing chamber and to remove the substrate when processing is completed.

    摘要翻译： 基板支撑装置包括间隔一定距离的第一和第二轴，该距离对应于或超过基板的宽度，以及至少一根支撑基板的线。 电线具有连接到第一和第二轴中的相应端的端部。 线被升高和降低以将衬底放置在衬底处理室中的下电极上，并且当处理完成时移除衬底。

    Flat luminescence lamp and method for fabricating the same
    10.
    发明授权
    Flat luminescence lamp and method for fabricating the same 有权

    公开(公告)号：US06897602B2

    公开(公告)日：2005-05-24

    申请号：US09893554

    申请日：2001-06-29

    申请人： Suk Min Son

    发明人： Suk Min Son

    IPC分类号： H01J61/78 ,  H01J61/30 ,  H01J61/52 ,  H01K1/58

    CPC分类号： H01J61/52 ,  H01J61/305

    摘要： A flat luminescence lamp includes a first substrate having a first surface and a second surface, a second substrate having a first surface disposed facing opposite to the first surface of the first substrate, a first luminescence layer formed on the first surface of the first substrate, a second luminescence layer formed on the first surface of the second substrate, and a plurality of grooves formed on the second surface of the first substrate.