发明授权
- 专利标题: Substrate supporting apparatus
- 专利标题(中): 基板支撑装置
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申请号: US12188453申请日: 2008-08-08
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公开(公告)号: US08087652B2公开(公告)日: 2012-01-03
- 发明人: Suk Min Son
- 申请人: Suk Min Son
- 申请人地址: KR Seongnam-Si
- 专利权人: Advanced Display Process Engineering Co., Ltd
- 当前专利权人: Advanced Display Process Engineering Co., Ltd
- 当前专利权人地址: KR Seongnam-Si
- 代理机构: Ked & Associates LLP
- 优先权: KR10-2007-0079562 20070808
- 主分类号: B23P19/00
- IPC分类号: B23P19/00
摘要:
A substrate supporting apparatus includes first and second shafts spaced by a distance that corresponds to or exceeds a width of a substrate, and at least one wire to support the substrate. The wire has ends coupled to respective ones of the first and second shafts. The wire is raised and lowered to place a substrate onto a lower electrode in a substrate processing chamber and to remove the substrate when processing is completed.
公开/授权文献
- US20090042324A1 SUBSTRATE SUPPORTING APPARATUS 公开/授权日:2009-02-12
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