发明申请
- 专利标题： Apparatus for manufacturing flat-panel display
- 专利标题（中）： 用于制造平板显示器的装置
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申请号： US11239398申请日： 2005-09-29
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公开(公告)号： US20060071384A1公开(公告)日： 2006-04-06
- 发明人: Young Lee , Jun Choi , Saeng Jo , Hyun Ahn , Suk-Min Son , Sung Ahn
- 申请人： Young Lee , Jun Choi , Saeng Jo , Hyun Ahn , Suk-Min Son , Sung Ahn
- 专利权人： Advanced Display Process Engineering Co. Ltd.
- 当前专利权人： Advanced Display Process Engineering Co. Ltd.
- 优先权： KR10-2004-0079416 20041006; KR10-2004-0083843 20041020; KR10-2004-0094230 20041117; KR10-2004-0102975 20041208; KR10-2004-0111693 20041224
- 主分类号： B23Q1/25
- IPC分类号： B23Q1/25 ; B23Q3/00
摘要：
Disclosed herein is a flat panel display (FPD) manufacturing apparatus for performing a desired process for a substrate positioned in a chamber after establishing a vacuum atmosphere in the chamber. The vacuum chamber is divided into a chamber body and an upper cover to ensure easy opening/closing operations of the upper cover.
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